6/29/2012	10:12:44 AM	Helium valve closed
6/29/2012	10:12:44 AM	H2 valve closed
6/29/2012	10:12:44 AM	BCl3 valve closed
6/29/2012	10:12:44 AM	PH3 valve closed
6/29/2012	10:12:44 AM	SiCl4 pre valve closed
6/29/2012	10:12:44 AM	SiCl4 post valve closed
6/29/2012	10:12:44 AM	Main Vac valve closed
6/29/2012	10:12:44 AM	Bypass valve closed
6/29/2012	10:12:44 AM	Bubbler valve closed
6/29/2012	10:12:44 AM	Helium MFC set to  0.000000
6/29/2012	10:12:44 AM	H2 MFC set to  0.000000
6/29/2012	10:12:44 AM	BCl3 MFC set to  0.000000
6/29/2012	10:12:44 AM	PH3 MFC set to  0.000000
6/29/2012	10:12:44 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:12:44 AM	Bypass solenoid MFC set to  760.000000
6/29/2012	10:12:45 AM	Tube furnace set to 0
6/29/2012	10:12:45 AM	Main Vac valve opened
6/29/2012	10:16:10 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2012	10:16:10 AM	Recipe started at 10:16 AM
6/29/2012	10:16:10 AM	Helium valve closed
6/29/2012	10:16:10 AM	H2 valve closed
6/29/2012	10:16:10 AM	BCl3 valve closed
6/29/2012	10:16:10 AM	PH3 valve closed
6/29/2012	10:16:10 AM	SiCl4 pre valve closed
6/29/2012	10:16:10 AM	SiCl4 post valve closed
6/29/2012	10:16:10 AM	Main Vac valve closed
6/29/2012	10:16:10 AM	Bypass valve closed
6/29/2012	10:16:10 AM	Bubbler valve closed
6/29/2012	10:16:10 AM	Helium MFC set to  0.000000
6/29/2012	10:16:10 AM	H2 MFC set to  0.000000
6/29/2012	10:16:10 AM	BCl3 MFC set to  0.000000
6/29/2012	10:16:10 AM	PH3 MFC set to  0.000000
6/29/2012	10:16:10 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:16:10 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:16:11 AM	Tube furnace set to 0
6/29/2012	10:16:14 AM	H2 valve closed
6/29/2012	10:16:14 AM	BCl3 valve closed
6/29/2012	10:16:14 AM	PH3 valve closed
6/29/2012	10:16:14 AM	SiCl4 pre valve closed
6/29/2012	10:16:14 AM	SiCl4 post valve closed
6/29/2012	10:16:14 AM	Main Vac valve closed
6/29/2012	10:16:14 AM	Bypass valve closed
6/29/2012	10:16:14 AM	Bubbler valve closed
6/29/2012	10:16:14 AM	Helium valve opened
6/29/2012	10:16:14 AM	Helium MFC set to  500.000000
6/29/2012	10:16:14 AM	H2 MFC set to  0.000000
6/29/2012	10:16:14 AM	BCl3 MFC set to  0.000000
6/29/2012	10:16:14 AM	PH3 MFC set to  0.000000
6/29/2012	10:16:14 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:16:14 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:16:14 AM	Tube furnace set to 0
6/29/2012	10:17:26 AM	Helium valve closed
6/29/2012	10:17:26 AM	H2 valve closed
6/29/2012	10:17:26 AM	BCl3 valve closed
6/29/2012	10:17:26 AM	PH3 valve closed
6/29/2012	10:17:26 AM	SiCl4 pre valve closed
6/29/2012	10:17:26 AM	SiCl4 post valve closed
6/29/2012	10:17:26 AM	Main Vac valve closed
6/29/2012	10:17:26 AM	Bypass valve closed
6/29/2012	10:17:26 AM	Bubbler valve closed
6/29/2012	10:17:26 AM	Helium MFC set to  0.000000
6/29/2012	10:17:26 AM	H2 MFC set to  0.000000
6/29/2012	10:17:26 AM	BCl3 MFC set to  0.000000
6/29/2012	10:17:26 AM	PH3 MFC set to  0.000000
6/29/2012	10:17:26 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:17:26 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:17:27 AM	Tube furnace set to 0
6/29/2012	10:17:28 AM	Run finished at 10:17 AM
6/29/2012	10:17:28 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2012	10:22:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2012	10:22:52 AM	Recipe started at 10:22 AM
6/29/2012	10:22:52 AM	Helium valve closed
6/29/2012	10:22:52 AM	H2 valve closed
6/29/2012	10:22:52 AM	BCl3 valve closed
6/29/2012	10:22:52 AM	PH3 valve closed
6/29/2012	10:22:52 AM	SiCl4 pre valve closed
6/29/2012	10:22:52 AM	SiCl4 post valve closed
6/29/2012	10:22:52 AM	Main Vac valve closed
6/29/2012	10:22:52 AM	Bubbler valve closed
6/29/2012	10:22:52 AM	Bypass valve opened
6/29/2012	10:22:52 AM	Helium MFC set to  0.000000
6/29/2012	10:22:52 AM	H2 MFC set to  0.000000
6/29/2012	10:22:52 AM	BCl3 MFC set to  0.000000
6/29/2012	10:22:52 AM	PH3 MFC set to  0.000000
6/29/2012	10:22:52 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:22:52 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:22:52 AM	Tube furnace set to 0
6/29/2012	10:23:59 AM	Helium valve closed
6/29/2012	10:23:59 AM	H2 valve closed
6/29/2012	10:23:59 AM	BCl3 valve closed
6/29/2012	10:23:59 AM	PH3 valve closed
6/29/2012	10:23:59 AM	SiCl4 pre valve closed
6/29/2012	10:23:59 AM	SiCl4 post valve closed
6/29/2012	10:23:59 AM	Main Vac valve closed
6/29/2012	10:23:59 AM	Bubbler valve closed
6/29/2012	10:23:59 AM	Bypass valve opened
6/29/2012	10:23:59 AM	Helium MFC set to  0.000000
6/29/2012	10:23:59 AM	H2 MFC set to  0.000000
6/29/2012	10:23:59 AM	BCl3 MFC set to  0.000000
6/29/2012	10:23:59 AM	PH3 MFC set to  0.000000
6/29/2012	10:23:59 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:23:59 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:23:59 AM	Tube furnace set to 0
6/29/2012	10:24:59 AM	Helium valve closed
6/29/2012	10:24:59 AM	H2 valve closed
6/29/2012	10:24:59 AM	BCl3 valve closed
6/29/2012	10:24:59 AM	PH3 valve closed
6/29/2012	10:24:59 AM	SiCl4 pre valve closed
6/29/2012	10:25:00 AM	SiCl4 post valve closed
6/29/2012	10:25:00 AM	Bypass valve closed
6/29/2012	10:25:00 AM	Bubbler valve closed
6/29/2012	10:25:00 AM	Main Vac valve opened
6/29/2012	10:25:00 AM	Helium MFC set to  0.000000
6/29/2012	10:25:00 AM	H2 MFC set to  0.000000
6/29/2012	10:25:00 AM	BCl3 MFC set to  0.000000
6/29/2012	10:25:00 AM	PH3 MFC set to  0.000000
6/29/2012	10:25:00 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:25:00 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:25:00 AM	Tube furnace set to 0
6/29/2012	10:25:01 AM	Run finished at 10:25 AM
6/29/2012	10:25:01 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2012	10:56:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/29/2012	10:56:16 AM	Recipe started at 10:56 AM
6/29/2012	10:56:16 AM	Helium valve closed
6/29/2012	10:56:16 AM	H2 valve closed
6/29/2012	10:56:16 AM	BCl3 valve closed
6/29/2012	10:56:16 AM	PH3 valve closed
6/29/2012	10:56:16 AM	SiCl4 pre valve closed
6/29/2012	10:56:16 AM	SiCl4 post valve closed
6/29/2012	10:56:16 AM	Main Vac valve closed
6/29/2012	10:56:16 AM	Bubbler valve closed
6/29/2012	10:56:16 AM	Bypass valve opened
6/29/2012	10:56:16 AM	Helium MFC set to  0.000000
6/29/2012	10:56:16 AM	H2 MFC set to  0.000000
6/29/2012	10:56:16 AM	BCl3 MFC set to  0.000000
6/29/2012	10:56:16 AM	PH3 MFC set to  0.000000
6/29/2012	10:56:16 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:56:16 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:56:16 AM	Tube furnace set to 0
6/29/2012	10:56:16 AM	Helium valve closed
6/29/2012	10:56:16 AM	H2 valve closed
6/29/2012	10:56:16 AM	BCl3 valve closed
6/29/2012	10:56:16 AM	PH3 valve closed
6/29/2012	10:56:16 AM	SiCl4 pre valve closed
6/29/2012	10:56:16 AM	SiCl4 post valve closed
6/29/2012	10:56:16 AM	Main Vac valve closed
6/29/2012	10:56:16 AM	Bubbler valve closed
6/29/2012	10:56:16 AM	Bypass valve opened
6/29/2012	10:56:16 AM	Helium MFC set to  0.000000
6/29/2012	10:56:16 AM	H2 MFC set to  0.000000
6/29/2012	10:56:16 AM	BCl3 MFC set to  0.000000
6/29/2012	10:56:16 AM	PH3 MFC set to  0.000000
6/29/2012	10:56:16 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:56:16 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:56:16 AM	Tube furnace set to 0
6/29/2012	10:56:18 AM	Helium valve closed
6/29/2012	10:56:18 AM	H2 valve closed
6/29/2012	10:56:18 AM	BCl3 valve closed
6/29/2012	10:56:18 AM	PH3 valve closed
6/29/2012	10:56:18 AM	SiCl4 pre valve closed
6/29/2012	10:56:18 AM	SiCl4 post valve closed
6/29/2012	10:56:18 AM	Bypass valve closed
6/29/2012	10:56:18 AM	Bubbler valve closed
6/29/2012	10:56:18 AM	Main Vac valve opened
6/29/2012	10:56:18 AM	Helium MFC set to  0.000000
6/29/2012	10:56:18 AM	H2 MFC set to  0.000000
6/29/2012	10:56:18 AM	BCl3 MFC set to  0.000000
6/29/2012	10:56:18 AM	PH3 MFC set to  0.000000
6/29/2012	10:56:18 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:56:18 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:56:18 AM	Tube furnace set to 0
6/29/2012	10:56:19 AM	H2 valve closed
6/29/2012	10:56:19 AM	BCl3 valve closed
6/29/2012	10:56:19 AM	PH3 valve closed
6/29/2012	10:56:19 AM	SiCl4 pre valve closed
6/29/2012	10:56:19 AM	SiCl4 post valve closed
6/29/2012	10:56:19 AM	Bypass valve closed
6/29/2012	10:56:19 AM	Bubbler valve closed
6/29/2012	10:56:19 AM	Helium valve opened
6/29/2012	10:56:19 AM	Main Vac valve opened
6/29/2012	10:56:19 AM	Helium MFC set to  20.000000
6/29/2012	10:56:19 AM	H2 MFC set to  0.000000
6/29/2012	10:56:19 AM	BCl3 MFC set to  0.000000
6/29/2012	10:56:19 AM	PH3 MFC set to  0.000000
6/29/2012	10:56:19 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:56:19 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:56:19 AM	Tube furnace set to 0
6/29/2012	10:56:49 AM	Helium valve closed
6/29/2012	10:56:49 AM	H2 valve closed
6/29/2012	10:56:49 AM	BCl3 valve closed
6/29/2012	10:56:49 AM	PH3 valve closed
6/29/2012	10:56:49 AM	SiCl4 pre valve closed
6/29/2012	10:56:49 AM	SiCl4 post valve closed
6/29/2012	10:56:49 AM	Bypass valve closed
6/29/2012	10:56:49 AM	Bubbler valve closed
6/29/2012	10:56:49 AM	Main Vac valve opened
6/29/2012	10:56:49 AM	Helium MFC set to  0.000000
6/29/2012	10:56:49 AM	H2 MFC set to  0.000000
6/29/2012	10:56:49 AM	BCl3 MFC set to  0.000000
6/29/2012	10:56:49 AM	PH3 MFC set to  0.000000
6/29/2012	10:56:49 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:56:49 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:56:49 AM	Tube furnace set to 0
6/29/2012	10:57:19 AM	H2 valve closed
6/29/2012	10:57:19 AM	BCl3 valve closed
6/29/2012	10:57:19 AM	PH3 valve closed
6/29/2012	10:57:19 AM	SiCl4 pre valve closed
6/29/2012	10:57:19 AM	SiCl4 post valve closed
6/29/2012	10:57:19 AM	Bypass valve closed
6/29/2012	10:57:19 AM	Bubbler valve closed
6/29/2012	10:57:19 AM	Helium valve opened
6/29/2012	10:57:19 AM	Main Vac valve opened
6/29/2012	10:57:19 AM	Helium MFC set to  20.000000
6/29/2012	10:57:19 AM	H2 MFC set to  0.000000
6/29/2012	10:57:19 AM	BCl3 MFC set to  0.000000
6/29/2012	10:57:19 AM	PH3 MFC set to  0.000000
6/29/2012	10:57:19 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:57:19 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:57:19 AM	Tube furnace set to 0
6/29/2012	10:57:49 AM	Helium valve closed
6/29/2012	10:57:49 AM	H2 valve closed
6/29/2012	10:57:49 AM	BCl3 valve closed
6/29/2012	10:57:49 AM	PH3 valve closed
6/29/2012	10:57:49 AM	SiCl4 pre valve closed
6/29/2012	10:57:49 AM	SiCl4 post valve closed
6/29/2012	10:57:49 AM	Bypass valve closed
6/29/2012	10:57:49 AM	Bubbler valve closed
6/29/2012	10:57:49 AM	Main Vac valve opened
6/29/2012	10:57:49 AM	Helium MFC set to  0.000000
6/29/2012	10:57:49 AM	H2 MFC set to  0.000000
6/29/2012	10:57:49 AM	BCl3 MFC set to  0.000000
6/29/2012	10:57:49 AM	PH3 MFC set to  0.000000
6/29/2012	10:57:49 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:57:49 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:57:50 AM	Tube furnace set to 0
6/29/2012	10:58:20 AM	H2 valve closed
6/29/2012	10:58:20 AM	BCl3 valve closed
6/29/2012	10:58:20 AM	PH3 valve closed
6/29/2012	10:58:20 AM	SiCl4 pre valve closed
6/29/2012	10:58:20 AM	SiCl4 post valve closed
6/29/2012	10:58:20 AM	Bypass valve closed
6/29/2012	10:58:20 AM	Bubbler valve closed
6/29/2012	10:58:20 AM	Helium valve opened
6/29/2012	10:58:20 AM	Main Vac valve opened
6/29/2012	10:58:20 AM	Helium MFC set to  20.000000
6/29/2012	10:58:20 AM	H2 MFC set to  0.000000
6/29/2012	10:58:20 AM	BCl3 MFC set to  0.000000
6/29/2012	10:58:20 AM	PH3 MFC set to  0.000000
6/29/2012	10:58:20 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:58:20 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:58:20 AM	Tube furnace set to 0
6/29/2012	10:58:50 AM	Helium valve closed
6/29/2012	10:58:50 AM	H2 valve closed
6/29/2012	10:58:50 AM	BCl3 valve closed
6/29/2012	10:58:50 AM	PH3 valve closed
6/29/2012	10:58:50 AM	SiCl4 pre valve closed
6/29/2012	10:58:50 AM	SiCl4 post valve closed
6/29/2012	10:58:50 AM	Bypass valve closed
6/29/2012	10:58:50 AM	Bubbler valve closed
6/29/2012	10:58:50 AM	Main Vac valve opened
6/29/2012	10:58:50 AM	Helium MFC set to  0.000000
6/29/2012	10:58:50 AM	H2 MFC set to  0.000000
6/29/2012	10:58:50 AM	BCl3 MFC set to  0.000000
6/29/2012	10:58:50 AM	PH3 MFC set to  0.000000
6/29/2012	10:58:50 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:58:50 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:58:50 AM	Tube furnace set to 0
6/29/2012	10:59:20 AM	H2 valve closed
6/29/2012	10:59:20 AM	BCl3 valve closed
6/29/2012	10:59:20 AM	PH3 valve closed
6/29/2012	10:59:20 AM	SiCl4 pre valve closed
6/29/2012	10:59:20 AM	SiCl4 post valve closed
6/29/2012	10:59:20 AM	Bypass valve closed
6/29/2012	10:59:20 AM	Bubbler valve closed
6/29/2012	10:59:20 AM	Helium valve opened
6/29/2012	10:59:20 AM	Main Vac valve opened
6/29/2012	10:59:20 AM	Helium MFC set to  20.000000
6/29/2012	10:59:20 AM	H2 MFC set to  0.000000
6/29/2012	10:59:20 AM	BCl3 MFC set to  0.000000
6/29/2012	10:59:20 AM	PH3 MFC set to  0.000000
6/29/2012	10:59:20 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:59:20 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:59:20 AM	Tube furnace set to 0
6/29/2012	10:59:50 AM	Helium valve closed
6/29/2012	10:59:50 AM	H2 valve closed
6/29/2012	10:59:50 AM	BCl3 valve closed
6/29/2012	10:59:50 AM	PH3 valve closed
6/29/2012	10:59:50 AM	SiCl4 pre valve closed
6/29/2012	10:59:50 AM	SiCl4 post valve closed
6/29/2012	10:59:50 AM	Bypass valve closed
6/29/2012	10:59:50 AM	Bubbler valve closed
6/29/2012	10:59:50 AM	Main Vac valve opened
6/29/2012	10:59:50 AM	Helium MFC set to  0.000000
6/29/2012	10:59:50 AM	H2 MFC set to  0.000000
6/29/2012	10:59:50 AM	BCl3 MFC set to  0.000000
6/29/2012	10:59:50 AM	PH3 MFC set to  0.000000
6/29/2012	10:59:50 AM	SiCl4 MFC set to  0.000000
6/29/2012	10:59:50 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	10:59:51 AM	Tube furnace set to 0
6/29/2012	11:00:21 AM	H2 valve closed
6/29/2012	11:00:21 AM	BCl3 valve closed
6/29/2012	11:00:21 AM	PH3 valve closed
6/29/2012	11:00:21 AM	SiCl4 pre valve closed
6/29/2012	11:00:21 AM	SiCl4 post valve closed
6/29/2012	11:00:21 AM	Bypass valve closed
6/29/2012	11:00:21 AM	Bubbler valve closed
6/29/2012	11:00:21 AM	Helium valve opened
6/29/2012	11:00:21 AM	Main Vac valve opened
6/29/2012	11:00:21 AM	Helium MFC set to  20.000000
6/29/2012	11:00:21 AM	H2 MFC set to  0.000000
6/29/2012	11:00:21 AM	BCl3 MFC set to  0.000000
6/29/2012	11:00:21 AM	PH3 MFC set to  0.000000
6/29/2012	11:00:21 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:00:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:00:21 AM	Tube furnace set to 0
6/29/2012	11:00:51 AM	Helium valve closed
6/29/2012	11:00:51 AM	H2 valve closed
6/29/2012	11:00:51 AM	BCl3 valve closed
6/29/2012	11:00:51 AM	PH3 valve closed
6/29/2012	11:00:51 AM	SiCl4 pre valve closed
6/29/2012	11:00:51 AM	SiCl4 post valve closed
6/29/2012	11:00:51 AM	Bypass valve closed
6/29/2012	11:00:51 AM	Bubbler valve closed
6/29/2012	11:00:51 AM	Main Vac valve opened
6/29/2012	11:00:51 AM	Helium MFC set to  0.000000
6/29/2012	11:00:51 AM	H2 MFC set to  0.000000
6/29/2012	11:00:51 AM	BCl3 MFC set to  0.000000
6/29/2012	11:00:51 AM	PH3 MFC set to  0.000000
6/29/2012	11:00:51 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:00:51 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:00:51 AM	Tube furnace set to 0
6/29/2012	11:01:21 AM	H2 valve closed
6/29/2012	11:01:21 AM	BCl3 valve closed
6/29/2012	11:01:21 AM	PH3 valve closed
6/29/2012	11:01:21 AM	SiCl4 pre valve closed
6/29/2012	11:01:21 AM	SiCl4 post valve closed
6/29/2012	11:01:21 AM	Bypass valve closed
6/29/2012	11:01:21 AM	Bubbler valve closed
6/29/2012	11:01:21 AM	Helium valve opened
6/29/2012	11:01:21 AM	Main Vac valve opened
6/29/2012	11:01:21 AM	Helium MFC set to  20.000000
6/29/2012	11:01:21 AM	H2 MFC set to  0.000000
6/29/2012	11:01:21 AM	BCl3 MFC set to  0.000000
6/29/2012	11:01:21 AM	PH3 MFC set to  0.000000
6/29/2012	11:01:21 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:01:21 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:01:21 AM	Tube furnace set to 0
6/29/2012	11:01:51 AM	Helium valve closed
6/29/2012	11:01:51 AM	H2 valve closed
6/29/2012	11:01:51 AM	BCl3 valve closed
6/29/2012	11:01:51 AM	PH3 valve closed
6/29/2012	11:01:51 AM	SiCl4 pre valve closed
6/29/2012	11:01:51 AM	SiCl4 post valve closed
6/29/2012	11:01:51 AM	Bypass valve closed
6/29/2012	11:01:51 AM	Bubbler valve closed
6/29/2012	11:01:51 AM	Main Vac valve opened
6/29/2012	11:01:51 AM	Helium MFC set to  0.000000
6/29/2012	11:01:51 AM	H2 MFC set to  0.000000
6/29/2012	11:01:51 AM	BCl3 MFC set to  0.000000
6/29/2012	11:01:51 AM	PH3 MFC set to  0.000000
6/29/2012	11:01:51 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:01:51 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:01:51 AM	Tube furnace set to 0
6/29/2012	11:02:21 AM	H2 valve closed
6/29/2012	11:02:22 AM	BCl3 valve closed
6/29/2012	11:02:22 AM	PH3 valve closed
6/29/2012	11:02:22 AM	SiCl4 pre valve closed
6/29/2012	11:02:22 AM	SiCl4 post valve closed
6/29/2012	11:02:22 AM	Bypass valve closed
6/29/2012	11:02:22 AM	Bubbler valve closed
6/29/2012	11:02:22 AM	Helium valve opened
6/29/2012	11:02:22 AM	Main Vac valve opened
6/29/2012	11:02:22 AM	Helium MFC set to  20.000000
6/29/2012	11:02:22 AM	H2 MFC set to  0.000000
6/29/2012	11:02:22 AM	BCl3 MFC set to  0.000000
6/29/2012	11:02:22 AM	PH3 MFC set to  0.000000
6/29/2012	11:02:22 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:02:22 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:02:22 AM	Tube furnace set to 0
6/29/2012	11:02:52 AM	Helium valve closed
6/29/2012	11:02:52 AM	H2 valve closed
6/29/2012	11:02:52 AM	BCl3 valve closed
6/29/2012	11:02:52 AM	PH3 valve closed
6/29/2012	11:02:52 AM	SiCl4 pre valve closed
6/29/2012	11:02:52 AM	SiCl4 post valve closed
6/29/2012	11:02:52 AM	Bypass valve closed
6/29/2012	11:02:52 AM	Bubbler valve closed
6/29/2012	11:02:52 AM	Main Vac valve opened
6/29/2012	11:02:52 AM	Helium MFC set to  0.000000
6/29/2012	11:02:52 AM	H2 MFC set to  0.000000
6/29/2012	11:02:52 AM	BCl3 MFC set to  0.000000
6/29/2012	11:02:52 AM	PH3 MFC set to  0.000000
6/29/2012	11:02:52 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:02:52 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:02:52 AM	Tube furnace set to 0
6/29/2012	11:03:22 AM	H2 valve closed
6/29/2012	11:03:22 AM	BCl3 valve closed
6/29/2012	11:03:22 AM	PH3 valve closed
6/29/2012	11:03:22 AM	SiCl4 pre valve closed
6/29/2012	11:03:22 AM	SiCl4 post valve closed
6/29/2012	11:03:22 AM	Bypass valve closed
6/29/2012	11:03:22 AM	Bubbler valve closed
6/29/2012	11:03:22 AM	Helium valve opened
6/29/2012	11:03:22 AM	Main Vac valve opened
6/29/2012	11:03:22 AM	Helium MFC set to  20.000000
6/29/2012	11:03:22 AM	H2 MFC set to  0.000000
6/29/2012	11:03:22 AM	BCl3 MFC set to  0.000000
6/29/2012	11:03:22 AM	PH3 MFC set to  0.000000
6/29/2012	11:03:22 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:03:22 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:03:22 AM	Tube furnace set to 0
6/29/2012	11:03:52 AM	Helium valve closed
6/29/2012	11:03:52 AM	H2 valve closed
6/29/2012	11:03:52 AM	BCl3 valve closed
6/29/2012	11:03:52 AM	PH3 valve closed
6/29/2012	11:03:52 AM	SiCl4 pre valve closed
6/29/2012	11:03:52 AM	SiCl4 post valve closed
6/29/2012	11:03:52 AM	Bypass valve closed
6/29/2012	11:03:52 AM	Bubbler valve closed
6/29/2012	11:03:52 AM	Main Vac valve opened
6/29/2012	11:03:52 AM	Helium MFC set to  0.000000
6/29/2012	11:03:52 AM	H2 MFC set to  0.000000
6/29/2012	11:03:52 AM	BCl3 MFC set to  0.000000
6/29/2012	11:03:52 AM	PH3 MFC set to  0.000000
6/29/2012	11:03:52 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:03:52 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:03:52 AM	Tube furnace set to 0
6/29/2012	11:04:22 AM	H2 valve closed
6/29/2012	11:04:22 AM	BCl3 valve closed
6/29/2012	11:04:22 AM	PH3 valve closed
6/29/2012	11:04:22 AM	SiCl4 pre valve closed
6/29/2012	11:04:22 AM	SiCl4 post valve closed
6/29/2012	11:04:22 AM	Bypass valve closed
6/29/2012	11:04:22 AM	Bubbler valve closed
6/29/2012	11:04:22 AM	Helium valve opened
6/29/2012	11:04:22 AM	Main Vac valve opened
6/29/2012	11:04:22 AM	Helium MFC set to  20.000000
6/29/2012	11:04:22 AM	H2 MFC set to  0.000000
6/29/2012	11:04:22 AM	BCl3 MFC set to  0.000000
6/29/2012	11:04:22 AM	PH3 MFC set to  0.000000
6/29/2012	11:04:22 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:04:23 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:04:23 AM	Tube furnace set to 0
6/29/2012	11:04:53 AM	Helium valve closed
6/29/2012	11:04:53 AM	H2 valve closed
6/29/2012	11:04:53 AM	BCl3 valve closed
6/29/2012	11:04:53 AM	PH3 valve closed
6/29/2012	11:04:53 AM	SiCl4 pre valve closed
6/29/2012	11:04:53 AM	SiCl4 post valve closed
6/29/2012	11:04:53 AM	Bypass valve closed
6/29/2012	11:04:53 AM	Bubbler valve closed
6/29/2012	11:04:53 AM	Main Vac valve opened
6/29/2012	11:04:53 AM	Helium MFC set to  0.000000
6/29/2012	11:04:53 AM	H2 MFC set to  0.000000
6/29/2012	11:04:53 AM	BCl3 MFC set to  0.000000
6/29/2012	11:04:53 AM	PH3 MFC set to  0.000000
6/29/2012	11:04:53 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:04:53 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:04:53 AM	Tube furnace set to 0
6/29/2012	11:05:23 AM	H2 valve closed
6/29/2012	11:05:23 AM	BCl3 valve closed
6/29/2012	11:05:23 AM	PH3 valve closed
6/29/2012	11:05:23 AM	SiCl4 pre valve closed
6/29/2012	11:05:23 AM	SiCl4 post valve closed
6/29/2012	11:05:23 AM	Bypass valve closed
6/29/2012	11:05:23 AM	Bubbler valve closed
6/29/2012	11:05:23 AM	Helium valve opened
6/29/2012	11:05:23 AM	Main Vac valve opened
6/29/2012	11:05:23 AM	Helium MFC set to  20.000000
6/29/2012	11:05:23 AM	H2 MFC set to  0.000000
6/29/2012	11:05:23 AM	BCl3 MFC set to  0.000000
6/29/2012	11:05:23 AM	PH3 MFC set to  0.000000
6/29/2012	11:05:23 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:05:23 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:05:23 AM	Tube furnace set to 0
6/29/2012	11:05:53 AM	Helium valve closed
6/29/2012	11:05:53 AM	H2 valve closed
6/29/2012	11:05:53 AM	BCl3 valve closed
6/29/2012	11:05:53 AM	PH3 valve closed
6/29/2012	11:05:53 AM	SiCl4 pre valve closed
6/29/2012	11:05:53 AM	SiCl4 post valve closed
6/29/2012	11:05:53 AM	Bypass valve closed
6/29/2012	11:05:53 AM	Bubbler valve closed
6/29/2012	11:05:53 AM	Main Vac valve opened
6/29/2012	11:05:53 AM	Helium MFC set to  0.000000
6/29/2012	11:05:53 AM	H2 MFC set to  0.000000
6/29/2012	11:05:53 AM	BCl3 MFC set to  0.000000
6/29/2012	11:05:53 AM	PH3 MFC set to  0.000000
6/29/2012	11:05:53 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:05:53 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:05:53 AM	Tube furnace set to 0
6/29/2012	11:05:54 AM	Run finished at 11:05 AM
6/29/2012	11:05:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/29/2012	11:07:19 AM	Main Vac valve closed
6/29/2012	11:07:35 AM	Main Vac valve opened
6/29/2012	11:08:54 AM	Recipe started at 11:08 AM
6/29/2012	11:08:54 AM	Helium valve closed
6/29/2012	11:08:54 AM	H2 valve closed
6/29/2012	11:08:54 AM	BCl3 valve closed
6/29/2012	11:08:54 AM	PH3 valve closed
6/29/2012	11:08:54 AM	SiCl4 pre valve closed
6/29/2012	11:08:54 AM	SiCl4 post valve closed
6/29/2012	11:08:54 AM	Main Vac valve closed
6/29/2012	11:08:54 AM	Bypass valve closed
6/29/2012	11:08:54 AM	Bubbler valve closed
6/29/2012	11:08:54 AM	Helium MFC set to  0.000000
6/29/2012	11:08:54 AM	H2 MFC set to  0.000000
6/29/2012	11:08:54 AM	BCl3 MFC set to  0.000000
6/29/2012	11:08:54 AM	PH3 MFC set to  0.000000
6/29/2012	11:08:54 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:08:54 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:08:55 AM	Tube furnace set to 0
6/29/2012	11:08:58 AM	Helium valve closed
6/29/2012	11:08:58 AM	BCl3 valve closed
6/29/2012	11:08:58 AM	PH3 valve closed
6/29/2012	11:08:58 AM	SiCl4 pre valve closed
6/29/2012	11:08:58 AM	SiCl4 post valve closed
6/29/2012	11:08:58 AM	Main Vac valve closed
6/29/2012	11:08:58 AM	Bypass valve closed
6/29/2012	11:08:58 AM	Bubbler valve closed
6/29/2012	11:08:58 AM	H2 valve opened
6/29/2012	11:08:58 AM	Helium MFC set to  0.000000
6/29/2012	11:08:58 AM	H2 MFC set to  500.000000
6/29/2012	11:08:58 AM	BCl3 MFC set to  0.000000
6/29/2012	11:08:58 AM	PH3 MFC set to  0.000000
6/29/2012	11:08:58 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:08:58 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:08:58 AM	Tube furnace set to 0
6/29/2012	11:10:15 AM	Helium valve closed
6/29/2012	11:10:15 AM	BCl3 valve closed
6/29/2012	11:10:15 AM	PH3 valve closed
6/29/2012	11:10:15 AM	SiCl4 pre valve closed
6/29/2012	11:10:15 AM	SiCl4 post valve closed
6/29/2012	11:10:15 AM	Main Vac valve closed
6/29/2012	11:10:15 AM	Bypass valve closed
6/29/2012	11:10:15 AM	H2 valve opened
6/29/2012	11:10:15 AM	Bubbler valve opened
6/29/2012	11:10:15 AM	Helium MFC set to  0.000000
6/29/2012	11:10:15 AM	H2 MFC set to  500.000000
6/29/2012	11:10:15 AM	BCl3 MFC set to  0.000000
6/29/2012	11:10:15 AM	PH3 MFC set to  0.000000
6/29/2012	11:10:15 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:10:15 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:10:15 AM	Tube furnace set to 0
6/29/2012	11:10:17 AM	Helium valve closed
6/29/2012	11:10:17 AM	BCl3 valve closed
6/29/2012	11:10:17 AM	PH3 valve closed
6/29/2012	11:10:17 AM	SiCl4 pre valve closed
6/29/2012	11:10:17 AM	SiCl4 post valve closed
6/29/2012	11:10:17 AM	Main Vac valve closed
6/29/2012	11:10:17 AM	Bypass valve closed
6/29/2012	11:10:17 AM	H2 valve opened
6/29/2012	11:10:17 AM	Bubbler valve opened
6/29/2012	11:10:17 AM	Helium MFC set to  0.000000
6/29/2012	11:10:17 AM	H2 MFC set to  500.000000
6/29/2012	11:10:17 AM	BCl3 MFC set to  0.000000
6/29/2012	11:10:17 AM	PH3 MFC set to  0.000000
6/29/2012	11:10:17 AM	SiCl4 MFC set to  0.000000
6/29/2012	11:10:17 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:10:17 AM	Tube furnace set to 1000
6/29/2012	11:30:17 AM	Helium valve closed
6/29/2012	11:30:17 AM	PH3 valve closed
6/29/2012	11:30:17 AM	Main Vac valve closed
6/29/2012	11:30:17 AM	Bypass valve closed
6/29/2012	11:30:17 AM	H2 valve opened
6/29/2012	11:30:17 AM	BCl3 valve opened
6/29/2012	11:30:17 AM	SiCl4 pre valve opened
6/29/2012	11:30:17 AM	SiCl4 post valve opened
6/29/2012	11:30:17 AM	Bubbler valve opened
6/29/2012	11:30:17 AM	Helium MFC set to  0.000000
6/29/2012	11:30:17 AM	H2 MFC set to  500.000000
6/29/2012	11:30:17 AM	BCl3 MFC set to  1.000000
6/29/2012	11:30:17 AM	PH3 MFC set to  0.000000
6/29/2012	11:30:17 AM	SiCl4 MFC set to  50.000000
6/29/2012	11:30:17 AM	Bypass solenoid MFC set to  0.000000
6/29/2012	11:30:17 AM	Tube furnace set to 1000
6/29/2012	12:30:17 PM	Helium valve closed
6/29/2012	12:30:17 PM	BCl3 valve closed
6/29/2012	12:30:17 PM	PH3 valve closed
6/29/2012	12:30:17 PM	SiCl4 pre valve closed
6/29/2012	12:30:17 PM	SiCl4 post valve closed
6/29/2012	12:30:17 PM	Main Vac valve closed
6/29/2012	12:30:17 PM	Bypass valve closed
6/29/2012	12:30:17 PM	H2 valve opened
6/29/2012	12:30:17 PM	Bubbler valve opened
6/29/2012	12:30:17 PM	Helium MFC set to  0.000000
6/29/2012	12:30:17 PM	H2 MFC set to  500.000000
6/29/2012	12:30:17 PM	BCl3 MFC set to  0.000000
6/29/2012	12:30:17 PM	PH3 MFC set to  0.000000
6/29/2012	12:30:17 PM	SiCl4 MFC set to  0.000000
6/29/2012	12:30:17 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	12:30:17 PM	Tube furnace set to 750
6/29/2012	12:35:17 PM	H2 valve closed
6/29/2012	12:35:17 PM	BCl3 valve closed
6/29/2012	12:35:17 PM	PH3 valve closed
6/29/2012	12:35:17 PM	SiCl4 pre valve closed
6/29/2012	12:35:17 PM	SiCl4 post valve closed
6/29/2012	12:35:17 PM	Main Vac valve closed
6/29/2012	12:35:17 PM	Bypass valve closed
6/29/2012	12:35:17 PM	Helium valve opened
6/29/2012	12:35:17 PM	Bubbler valve opened
6/29/2012	12:35:17 PM	Helium MFC set to  500.000000
6/29/2012	12:35:17 PM	H2 MFC set to  0.000000
6/29/2012	12:35:17 PM	BCl3 MFC set to  0.000000
6/29/2012	12:35:17 PM	PH3 MFC set to  0.000000
6/29/2012	12:35:17 PM	SiCl4 MFC set to  0.000000
6/29/2012	12:35:17 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	12:35:17 PM	Tube furnace set to 0
6/29/2012	12:55:17 PM	Helium valve closed
6/29/2012	12:55:17 PM	H2 valve closed
6/29/2012	12:55:17 PM	BCl3 valve closed
6/29/2012	12:55:17 PM	PH3 valve closed
6/29/2012	12:55:17 PM	SiCl4 pre valve closed
6/29/2012	12:55:17 PM	SiCl4 post valve closed
6/29/2012	12:55:17 PM	Main Vac valve closed
6/29/2012	12:55:17 PM	Bypass valve closed
6/29/2012	12:55:17 PM	Bubbler valve closed
6/29/2012	12:55:17 PM	Helium MFC set to  0.000000
6/29/2012	12:55:17 PM	H2 MFC set to  0.000000
6/29/2012	12:55:17 PM	BCl3 MFC set to  0.000000
6/29/2012	12:55:18 PM	PH3 MFC set to  0.000000
6/29/2012	12:55:18 PM	SiCl4 MFC set to  0.000000
6/29/2012	12:55:18 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	12:55:18 PM	Tube furnace set to 0
6/29/2012	12:55:19 PM	Run finished at 12:55 PM
6/29/2012	1:17:03 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2012	1:17:04 PM	Recipe started at 1:17 PM
6/29/2012	1:17:04 PM	Helium valve closed
6/29/2012	1:17:04 PM	H2 valve closed
6/29/2012	1:17:04 PM	BCl3 valve closed
6/29/2012	1:17:04 PM	PH3 valve closed
6/29/2012	1:17:04 PM	SiCl4 pre valve closed
6/29/2012	1:17:04 PM	SiCl4 post valve closed
6/29/2012	1:17:04 PM	Main Vac valve closed
6/29/2012	1:17:04 PM	Bubbler valve closed
6/29/2012	1:17:04 PM	Bypass valve opened
6/29/2012	1:17:04 PM	Helium MFC set to  0.000000
6/29/2012	1:17:04 PM	H2 MFC set to  0.000000
6/29/2012	1:17:04 PM	BCl3 MFC set to  0.000000
6/29/2012	1:17:04 PM	PH3 MFC set to  0.000000
6/29/2012	1:17:04 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:17:04 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:17:04 PM	Tube furnace set to 0
6/29/2012	1:18:21 PM	Helium valve closed
6/29/2012	1:18:21 PM	H2 valve closed
6/29/2012	1:18:21 PM	BCl3 valve closed
6/29/2012	1:18:21 PM	PH3 valve closed
6/29/2012	1:18:21 PM	SiCl4 pre valve closed
6/29/2012	1:18:21 PM	SiCl4 post valve closed
6/29/2012	1:18:21 PM	Main Vac valve closed
6/29/2012	1:18:21 PM	Bubbler valve closed
6/29/2012	1:18:21 PM	Bypass valve opened
6/29/2012	1:18:21 PM	Helium MFC set to  0.000000
6/29/2012	1:18:21 PM	H2 MFC set to  0.000000
6/29/2012	1:18:21 PM	BCl3 MFC set to  0.000000
6/29/2012	1:18:21 PM	PH3 MFC set to  0.000000
6/29/2012	1:18:21 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:18:21 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:18:21 PM	Tube furnace set to 0
6/29/2012	1:19:21 PM	Helium valve closed
6/29/2012	1:19:21 PM	H2 valve closed
6/29/2012	1:19:21 PM	BCl3 valve closed
6/29/2012	1:19:21 PM	PH3 valve closed
6/29/2012	1:19:21 PM	SiCl4 pre valve closed
6/29/2012	1:19:21 PM	SiCl4 post valve closed
6/29/2012	1:19:21 PM	Bypass valve closed
6/29/2012	1:19:21 PM	Bubbler valve closed
6/29/2012	1:19:21 PM	Main Vac valve opened
6/29/2012	1:19:21 PM	Helium MFC set to  0.000000
6/29/2012	1:19:21 PM	H2 MFC set to  0.000000
6/29/2012	1:19:21 PM	BCl3 MFC set to  0.000000
6/29/2012	1:19:21 PM	PH3 MFC set to  0.000000
6/29/2012	1:19:21 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:19:21 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:19:21 PM	Tube furnace set to 0
6/29/2012	1:19:22 PM	Run finished at 1:19 PM
6/29/2012	1:19:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2012	1:39:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/29/2012	1:39:28 PM	Recipe started at 1:39 PM
6/29/2012	1:39:28 PM	Helium valve closed
6/29/2012	1:39:28 PM	H2 valve closed
6/29/2012	1:39:28 PM	BCl3 valve closed
6/29/2012	1:39:28 PM	PH3 valve closed
6/29/2012	1:39:28 PM	SiCl4 pre valve closed
6/29/2012	1:39:28 PM	SiCl4 post valve closed
6/29/2012	1:39:28 PM	Main Vac valve closed
6/29/2012	1:39:28 PM	Bubbler valve closed
6/29/2012	1:39:28 PM	Bypass valve opened
6/29/2012	1:39:28 PM	Helium MFC set to  0.000000
6/29/2012	1:39:28 PM	H2 MFC set to  0.000000
6/29/2012	1:39:28 PM	BCl3 MFC set to  0.000000
6/29/2012	1:39:28 PM	PH3 MFC set to  0.000000
6/29/2012	1:39:28 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:39:28 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:39:28 PM	Tube furnace set to 0
6/29/2012	1:39:28 PM	Helium valve closed
6/29/2012	1:39:28 PM	H2 valve closed
6/29/2012	1:39:28 PM	BCl3 valve closed
6/29/2012	1:39:28 PM	PH3 valve closed
6/29/2012	1:39:28 PM	SiCl4 pre valve closed
6/29/2012	1:39:28 PM	SiCl4 post valve closed
6/29/2012	1:39:28 PM	Main Vac valve closed
6/29/2012	1:39:28 PM	Bubbler valve closed
6/29/2012	1:39:28 PM	Bypass valve opened
6/29/2012	1:39:28 PM	Helium MFC set to  0.000000
6/29/2012	1:39:28 PM	H2 MFC set to  0.000000
6/29/2012	1:39:28 PM	BCl3 MFC set to  0.000000
6/29/2012	1:39:28 PM	PH3 MFC set to  0.000000
6/29/2012	1:39:28 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:39:28 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:39:29 PM	Tube furnace set to 0
6/29/2012	1:39:29 PM	Helium valve closed
6/29/2012	1:39:29 PM	H2 valve closed
6/29/2012	1:39:29 PM	BCl3 valve closed
6/29/2012	1:39:29 PM	PH3 valve closed
6/29/2012	1:39:29 PM	SiCl4 pre valve closed
6/29/2012	1:39:29 PM	SiCl4 post valve closed
6/29/2012	1:39:29 PM	Bypass valve closed
6/29/2012	1:39:29 PM	Bubbler valve closed
6/29/2012	1:39:29 PM	Main Vac valve opened
6/29/2012	1:39:29 PM	Helium MFC set to  0.000000
6/29/2012	1:39:29 PM	H2 MFC set to  0.000000
6/29/2012	1:39:29 PM	BCl3 MFC set to  0.000000
6/29/2012	1:39:29 PM	PH3 MFC set to  0.000000
6/29/2012	1:39:29 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:39:29 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:39:30 PM	Tube furnace set to 0
6/29/2012	1:39:30 PM	H2 valve closed
6/29/2012	1:39:30 PM	BCl3 valve closed
6/29/2012	1:39:30 PM	PH3 valve closed
6/29/2012	1:39:30 PM	SiCl4 pre valve closed
6/29/2012	1:39:30 PM	SiCl4 post valve closed
6/29/2012	1:39:30 PM	Bypass valve closed
6/29/2012	1:39:30 PM	Bubbler valve closed
6/29/2012	1:39:30 PM	Helium valve opened
6/29/2012	1:39:30 PM	Main Vac valve opened
6/29/2012	1:39:30 PM	Helium MFC set to  20.000000
6/29/2012	1:39:30 PM	H2 MFC set to  0.000000
6/29/2012	1:39:30 PM	BCl3 MFC set to  0.000000
6/29/2012	1:39:30 PM	PH3 MFC set to  0.000000
6/29/2012	1:39:30 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:39:30 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:39:30 PM	Tube furnace set to 0
6/29/2012	1:40:00 PM	Helium valve closed
6/29/2012	1:40:00 PM	H2 valve closed
6/29/2012	1:40:00 PM	BCl3 valve closed
6/29/2012	1:40:00 PM	PH3 valve closed
6/29/2012	1:40:00 PM	SiCl4 pre valve closed
6/29/2012	1:40:00 PM	SiCl4 post valve closed
6/29/2012	1:40:00 PM	Bypass valve closed
6/29/2012	1:40:00 PM	Bubbler valve closed
6/29/2012	1:40:00 PM	Main Vac valve opened
6/29/2012	1:40:00 PM	Helium MFC set to  0.000000
6/29/2012	1:40:00 PM	H2 MFC set to  0.000000
6/29/2012	1:40:00 PM	BCl3 MFC set to  0.000000
6/29/2012	1:40:00 PM	PH3 MFC set to  0.000000
6/29/2012	1:40:00 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:40:00 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:40:01 PM	Tube furnace set to 0
6/29/2012	1:40:31 PM	H2 valve closed
6/29/2012	1:40:31 PM	BCl3 valve closed
6/29/2012	1:40:31 PM	PH3 valve closed
6/29/2012	1:40:31 PM	SiCl4 pre valve closed
6/29/2012	1:40:31 PM	SiCl4 post valve closed
6/29/2012	1:40:31 PM	Bypass valve closed
6/29/2012	1:40:31 PM	Bubbler valve closed
6/29/2012	1:40:31 PM	Helium valve opened
6/29/2012	1:40:31 PM	Main Vac valve opened
6/29/2012	1:40:31 PM	Helium MFC set to  20.000000
6/29/2012	1:40:31 PM	H2 MFC set to  0.000000
6/29/2012	1:40:31 PM	BCl3 MFC set to  0.000000
6/29/2012	1:40:31 PM	PH3 MFC set to  0.000000
6/29/2012	1:40:31 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:40:31 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:40:31 PM	Tube furnace set to 0
6/29/2012	1:41:01 PM	Helium valve closed
6/29/2012	1:41:01 PM	H2 valve closed
6/29/2012	1:41:01 PM	BCl3 valve closed
6/29/2012	1:41:01 PM	PH3 valve closed
6/29/2012	1:41:01 PM	SiCl4 pre valve closed
6/29/2012	1:41:01 PM	SiCl4 post valve closed
6/29/2012	1:41:01 PM	Bypass valve closed
6/29/2012	1:41:01 PM	Bubbler valve closed
6/29/2012	1:41:01 PM	Main Vac valve opened
6/29/2012	1:41:01 PM	Helium MFC set to  0.000000
6/29/2012	1:41:01 PM	H2 MFC set to  0.000000
6/29/2012	1:41:01 PM	BCl3 MFC set to  0.000000
6/29/2012	1:41:01 PM	PH3 MFC set to  0.000000
6/29/2012	1:41:01 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:41:01 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:41:01 PM	Tube furnace set to 0
6/29/2012	1:41:31 PM	H2 valve closed
6/29/2012	1:41:31 PM	BCl3 valve closed
6/29/2012	1:41:31 PM	PH3 valve closed
6/29/2012	1:41:31 PM	SiCl4 pre valve closed
6/29/2012	1:41:31 PM	SiCl4 post valve closed
6/29/2012	1:41:31 PM	Bypass valve closed
6/29/2012	1:41:31 PM	Bubbler valve closed
6/29/2012	1:41:31 PM	Helium valve opened
6/29/2012	1:41:31 PM	Main Vac valve opened
6/29/2012	1:41:31 PM	Helium MFC set to  20.000000
6/29/2012	1:41:31 PM	H2 MFC set to  0.000000
6/29/2012	1:41:31 PM	BCl3 MFC set to  0.000000
6/29/2012	1:41:31 PM	PH3 MFC set to  0.000000
6/29/2012	1:41:31 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:41:31 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:41:31 PM	Tube furnace set to 0
6/29/2012	1:42:01 PM	Helium valve closed
6/29/2012	1:42:01 PM	H2 valve closed
6/29/2012	1:42:01 PM	BCl3 valve closed
6/29/2012	1:42:01 PM	PH3 valve closed
6/29/2012	1:42:01 PM	SiCl4 pre valve closed
6/29/2012	1:42:01 PM	SiCl4 post valve closed
6/29/2012	1:42:01 PM	Bypass valve closed
6/29/2012	1:42:01 PM	Bubbler valve closed
6/29/2012	1:42:01 PM	Main Vac valve opened
6/29/2012	1:42:01 PM	Helium MFC set to  0.000000
6/29/2012	1:42:01 PM	H2 MFC set to  0.000000
6/29/2012	1:42:01 PM	BCl3 MFC set to  0.000000
6/29/2012	1:42:01 PM	PH3 MFC set to  0.000000
6/29/2012	1:42:01 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:42:01 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:42:02 PM	Tube furnace set to 0
6/29/2012	1:42:32 PM	H2 valve closed
6/29/2012	1:42:32 PM	BCl3 valve closed
6/29/2012	1:42:32 PM	PH3 valve closed
6/29/2012	1:42:32 PM	SiCl4 pre valve closed
6/29/2012	1:42:32 PM	SiCl4 post valve closed
6/29/2012	1:42:32 PM	Bypass valve closed
6/29/2012	1:42:32 PM	Bubbler valve closed
6/29/2012	1:42:32 PM	Helium valve opened
6/29/2012	1:42:32 PM	Main Vac valve opened
6/29/2012	1:42:32 PM	Helium MFC set to  20.000000
6/29/2012	1:42:32 PM	H2 MFC set to  0.000000
6/29/2012	1:42:32 PM	BCl3 MFC set to  0.000000
6/29/2012	1:42:32 PM	PH3 MFC set to  0.000000
6/29/2012	1:42:32 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:42:32 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:42:32 PM	Tube furnace set to 0
6/29/2012	1:43:02 PM	Helium valve closed
6/29/2012	1:43:02 PM	H2 valve closed
6/29/2012	1:43:02 PM	BCl3 valve closed
6/29/2012	1:43:02 PM	PH3 valve closed
6/29/2012	1:43:02 PM	SiCl4 pre valve closed
6/29/2012	1:43:02 PM	SiCl4 post valve closed
6/29/2012	1:43:02 PM	Bypass valve closed
6/29/2012	1:43:02 PM	Bubbler valve closed
6/29/2012	1:43:02 PM	Main Vac valve opened
6/29/2012	1:43:02 PM	Helium MFC set to  0.000000
6/29/2012	1:43:02 PM	H2 MFC set to  0.000000
6/29/2012	1:43:02 PM	BCl3 MFC set to  0.000000
6/29/2012	1:43:02 PM	PH3 MFC set to  0.000000
6/29/2012	1:43:02 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:43:02 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:43:02 PM	Tube furnace set to 0
6/29/2012	1:43:32 PM	H2 valve closed
6/29/2012	1:43:32 PM	BCl3 valve closed
6/29/2012	1:43:32 PM	PH3 valve closed
6/29/2012	1:43:32 PM	SiCl4 pre valve closed
6/29/2012	1:43:32 PM	SiCl4 post valve closed
6/29/2012	1:43:32 PM	Bypass valve closed
6/29/2012	1:43:32 PM	Bubbler valve closed
6/29/2012	1:43:32 PM	Helium valve opened
6/29/2012	1:43:32 PM	Main Vac valve opened
6/29/2012	1:43:32 PM	Helium MFC set to  20.000000
6/29/2012	1:43:32 PM	H2 MFC set to  0.000000
6/29/2012	1:43:32 PM	BCl3 MFC set to  0.000000
6/29/2012	1:43:32 PM	PH3 MFC set to  0.000000
6/29/2012	1:43:32 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:43:32 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:43:32 PM	Tube furnace set to 0
6/29/2012	1:44:02 PM	Helium valve closed
6/29/2012	1:44:02 PM	H2 valve closed
6/29/2012	1:44:02 PM	BCl3 valve closed
6/29/2012	1:44:02 PM	PH3 valve closed
6/29/2012	1:44:02 PM	SiCl4 pre valve closed
6/29/2012	1:44:02 PM	SiCl4 post valve closed
6/29/2012	1:44:02 PM	Bypass valve closed
6/29/2012	1:44:02 PM	Bubbler valve closed
6/29/2012	1:44:02 PM	Main Vac valve opened
6/29/2012	1:44:02 PM	Helium MFC set to  0.000000
6/29/2012	1:44:02 PM	H2 MFC set to  0.000000
6/29/2012	1:44:02 PM	BCl3 MFC set to  0.000000
6/29/2012	1:44:02 PM	PH3 MFC set to  0.000000
6/29/2012	1:44:02 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:44:02 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:44:02 PM	Tube furnace set to 0
6/29/2012	1:44:33 PM	H2 valve closed
6/29/2012	1:44:33 PM	BCl3 valve closed
6/29/2012	1:44:33 PM	PH3 valve closed
6/29/2012	1:44:33 PM	SiCl4 pre valve closed
6/29/2012	1:44:33 PM	SiCl4 post valve closed
6/29/2012	1:44:33 PM	Bypass valve closed
6/29/2012	1:44:33 PM	Bubbler valve closed
6/29/2012	1:44:33 PM	Helium valve opened
6/29/2012	1:44:33 PM	Main Vac valve opened
6/29/2012	1:44:33 PM	Helium MFC set to  20.000000
6/29/2012	1:44:33 PM	H2 MFC set to  0.000000
6/29/2012	1:44:33 PM	BCl3 MFC set to  0.000000
6/29/2012	1:44:33 PM	PH3 MFC set to  0.000000
6/29/2012	1:44:33 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:44:33 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:44:33 PM	Tube furnace set to 0
6/29/2012	1:45:03 PM	Helium valve closed
6/29/2012	1:45:03 PM	H2 valve closed
6/29/2012	1:45:03 PM	BCl3 valve closed
6/29/2012	1:45:03 PM	PH3 valve closed
6/29/2012	1:45:03 PM	SiCl4 pre valve closed
6/29/2012	1:45:03 PM	SiCl4 post valve closed
6/29/2012	1:45:03 PM	Bypass valve closed
6/29/2012	1:45:03 PM	Bubbler valve closed
6/29/2012	1:45:03 PM	Main Vac valve opened
6/29/2012	1:45:03 PM	Helium MFC set to  0.000000
6/29/2012	1:45:03 PM	H2 MFC set to  0.000000
6/29/2012	1:45:03 PM	BCl3 MFC set to  0.000000
6/29/2012	1:45:03 PM	PH3 MFC set to  0.000000
6/29/2012	1:45:03 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:45:03 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:45:03 PM	Tube furnace set to 0
6/29/2012	1:45:33 PM	H2 valve closed
6/29/2012	1:45:33 PM	BCl3 valve closed
6/29/2012	1:45:33 PM	PH3 valve closed
6/29/2012	1:45:33 PM	SiCl4 pre valve closed
6/29/2012	1:45:33 PM	SiCl4 post valve closed
6/29/2012	1:45:33 PM	Bypass valve closed
6/29/2012	1:45:33 PM	Bubbler valve closed
6/29/2012	1:45:33 PM	Helium valve opened
6/29/2012	1:45:33 PM	Main Vac valve opened
6/29/2012	1:45:33 PM	Helium MFC set to  20.000000
6/29/2012	1:45:33 PM	H2 MFC set to  0.000000
6/29/2012	1:45:33 PM	BCl3 MFC set to  0.000000
6/29/2012	1:45:33 PM	PH3 MFC set to  0.000000
6/29/2012	1:45:33 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:45:33 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:45:33 PM	Tube furnace set to 0
6/29/2012	1:46:03 PM	Helium valve closed
6/29/2012	1:46:03 PM	H2 valve closed
6/29/2012	1:46:03 PM	BCl3 valve closed
6/29/2012	1:46:03 PM	PH3 valve closed
6/29/2012	1:46:03 PM	SiCl4 pre valve closed
6/29/2012	1:46:03 PM	SiCl4 post valve closed
6/29/2012	1:46:03 PM	Bypass valve closed
6/29/2012	1:46:03 PM	Bubbler valve closed
6/29/2012	1:46:03 PM	Main Vac valve opened
6/29/2012	1:46:03 PM	Helium MFC set to  0.000000
6/29/2012	1:46:03 PM	H2 MFC set to  0.000000
6/29/2012	1:46:03 PM	BCl3 MFC set to  0.000000
6/29/2012	1:46:03 PM	PH3 MFC set to  0.000000
6/29/2012	1:46:03 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:46:03 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:46:03 PM	Tube furnace set to 0
6/29/2012	1:46:33 PM	H2 valve closed
6/29/2012	1:46:33 PM	BCl3 valve closed
6/29/2012	1:46:33 PM	PH3 valve closed
6/29/2012	1:46:33 PM	SiCl4 pre valve closed
6/29/2012	1:46:33 PM	SiCl4 post valve closed
6/29/2012	1:46:33 PM	Bypass valve closed
6/29/2012	1:46:33 PM	Bubbler valve closed
6/29/2012	1:46:33 PM	Helium valve opened
6/29/2012	1:46:34 PM	Main Vac valve opened
6/29/2012	1:46:34 PM	Helium MFC set to  20.000000
6/29/2012	1:46:34 PM	H2 MFC set to  0.000000
6/29/2012	1:46:34 PM	BCl3 MFC set to  0.000000
6/29/2012	1:46:34 PM	PH3 MFC set to  0.000000
6/29/2012	1:46:34 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:46:34 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:46:34 PM	Tube furnace set to 0
6/29/2012	1:47:04 PM	Helium valve closed
6/29/2012	1:47:04 PM	H2 valve closed
6/29/2012	1:47:04 PM	BCl3 valve closed
6/29/2012	1:47:04 PM	PH3 valve closed
6/29/2012	1:47:04 PM	SiCl4 pre valve closed
6/29/2012	1:47:04 PM	SiCl4 post valve closed
6/29/2012	1:47:04 PM	Bypass valve closed
6/29/2012	1:47:04 PM	Bubbler valve closed
6/29/2012	1:47:04 PM	Main Vac valve opened
6/29/2012	1:47:04 PM	Helium MFC set to  0.000000
6/29/2012	1:47:04 PM	H2 MFC set to  0.000000
6/29/2012	1:47:04 PM	BCl3 MFC set to  0.000000
6/29/2012	1:47:04 PM	PH3 MFC set to  0.000000
6/29/2012	1:47:04 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:47:04 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:47:04 PM	Tube furnace set to 0
6/29/2012	1:47:34 PM	H2 valve closed
6/29/2012	1:47:34 PM	BCl3 valve closed
6/29/2012	1:47:34 PM	PH3 valve closed
6/29/2012	1:47:34 PM	SiCl4 pre valve closed
6/29/2012	1:47:34 PM	SiCl4 post valve closed
6/29/2012	1:47:34 PM	Bypass valve closed
6/29/2012	1:47:34 PM	Bubbler valve closed
6/29/2012	1:47:34 PM	Helium valve opened
6/29/2012	1:47:34 PM	Main Vac valve opened
6/29/2012	1:47:34 PM	Helium MFC set to  20.000000
6/29/2012	1:47:34 PM	H2 MFC set to  0.000000
6/29/2012	1:47:34 PM	BCl3 MFC set to  0.000000
6/29/2012	1:47:34 PM	PH3 MFC set to  0.000000
6/29/2012	1:47:34 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:47:34 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:47:34 PM	Tube furnace set to 0
6/29/2012	1:48:04 PM	Helium valve closed
6/29/2012	1:48:04 PM	H2 valve closed
6/29/2012	1:48:04 PM	BCl3 valve closed
6/29/2012	1:48:04 PM	PH3 valve closed
6/29/2012	1:48:04 PM	SiCl4 pre valve closed
6/29/2012	1:48:04 PM	SiCl4 post valve closed
6/29/2012	1:48:04 PM	Bypass valve closed
6/29/2012	1:48:04 PM	Bubbler valve closed
6/29/2012	1:48:04 PM	Main Vac valve opened
6/29/2012	1:48:04 PM	Helium MFC set to  0.000000
6/29/2012	1:48:04 PM	H2 MFC set to  0.000000
6/29/2012	1:48:04 PM	BCl3 MFC set to  0.000000
6/29/2012	1:48:04 PM	PH3 MFC set to  0.000000
6/29/2012	1:48:04 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:48:04 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:48:04 PM	Tube furnace set to 0
6/29/2012	1:48:34 PM	H2 valve closed
6/29/2012	1:48:34 PM	BCl3 valve closed
6/29/2012	1:48:34 PM	PH3 valve closed
6/29/2012	1:48:34 PM	SiCl4 pre valve closed
6/29/2012	1:48:34 PM	SiCl4 post valve closed
6/29/2012	1:48:34 PM	Bypass valve closed
6/29/2012	1:48:34 PM	Bubbler valve closed
6/29/2012	1:48:34 PM	Helium valve opened
6/29/2012	1:48:34 PM	Main Vac valve opened
6/29/2012	1:48:34 PM	Helium MFC set to  20.000000
6/29/2012	1:48:34 PM	H2 MFC set to  0.000000
6/29/2012	1:48:34 PM	BCl3 MFC set to  0.000000
6/29/2012	1:48:34 PM	PH3 MFC set to  0.000000
6/29/2012	1:48:34 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:48:34 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:48:35 PM	Tube furnace set to 0
6/29/2012	1:49:05 PM	Helium valve closed
6/29/2012	1:49:05 PM	H2 valve closed
6/29/2012	1:49:05 PM	BCl3 valve closed
6/29/2012	1:49:05 PM	PH3 valve closed
6/29/2012	1:49:05 PM	SiCl4 pre valve closed
6/29/2012	1:49:05 PM	SiCl4 post valve closed
6/29/2012	1:49:05 PM	Bypass valve closed
6/29/2012	1:49:05 PM	Bubbler valve closed
6/29/2012	1:49:05 PM	Main Vac valve opened
6/29/2012	1:49:05 PM	Helium MFC set to  0.000000
6/29/2012	1:49:05 PM	H2 MFC set to  0.000000
6/29/2012	1:49:05 PM	BCl3 MFC set to  0.000000
6/29/2012	1:49:05 PM	PH3 MFC set to  0.000000
6/29/2012	1:49:05 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:49:05 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:49:05 PM	Tube furnace set to 0
6/29/2012	1:49:06 PM	Run finished at 1:49 PM
6/29/2012	1:49:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/29/2012	1:50:16 PM	Main Vac valve closed
6/29/2012	1:50:29 PM	Main Vac valve opened
6/29/2012	1:51:53 PM	Recipe started at 1:51 PM
6/29/2012	1:51:53 PM	Helium valve closed
6/29/2012	1:51:53 PM	H2 valve closed
6/29/2012	1:51:53 PM	BCl3 valve closed
6/29/2012	1:51:53 PM	PH3 valve closed
6/29/2012	1:51:53 PM	SiCl4 pre valve closed
6/29/2012	1:51:53 PM	SiCl4 post valve closed
6/29/2012	1:51:53 PM	Main Vac valve closed
6/29/2012	1:51:53 PM	Bypass valve closed
6/29/2012	1:51:53 PM	Bubbler valve closed
6/29/2012	1:51:53 PM	Helium MFC set to  0.000000
6/29/2012	1:51:53 PM	H2 MFC set to  0.000000
6/29/2012	1:51:53 PM	BCl3 MFC set to  0.000000
6/29/2012	1:51:53 PM	PH3 MFC set to  0.000000
6/29/2012	1:51:53 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:51:53 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:51:53 PM	Tube furnace set to 0
6/29/2012	1:51:56 PM	Helium valve closed
6/29/2012	1:51:56 PM	BCl3 valve closed
6/29/2012	1:51:56 PM	PH3 valve closed
6/29/2012	1:51:56 PM	SiCl4 pre valve closed
6/29/2012	1:51:56 PM	SiCl4 post valve closed
6/29/2012	1:51:56 PM	Main Vac valve closed
6/29/2012	1:51:56 PM	Bypass valve closed
6/29/2012	1:51:56 PM	Bubbler valve closed
6/29/2012	1:51:56 PM	H2 valve opened
6/29/2012	1:51:56 PM	Helium MFC set to  0.000000
6/29/2012	1:51:56 PM	H2 MFC set to  500.000000
6/29/2012	1:51:56 PM	BCl3 MFC set to  0.000000
6/29/2012	1:51:56 PM	PH3 MFC set to  0.000000
6/29/2012	1:51:56 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:51:56 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:51:57 PM	Tube furnace set to 0
6/29/2012	1:53:13 PM	Helium valve closed
6/29/2012	1:53:13 PM	BCl3 valve closed
6/29/2012	1:53:13 PM	PH3 valve closed
6/29/2012	1:53:13 PM	SiCl4 pre valve closed
6/29/2012	1:53:13 PM	SiCl4 post valve closed
6/29/2012	1:53:13 PM	Main Vac valve closed
6/29/2012	1:53:13 PM	Bypass valve closed
6/29/2012	1:53:13 PM	H2 valve opened
6/29/2012	1:53:13 PM	Bubbler valve opened
6/29/2012	1:53:13 PM	Helium MFC set to  0.000000
6/29/2012	1:53:13 PM	H2 MFC set to  500.000000
6/29/2012	1:53:13 PM	BCl3 MFC set to  0.000000
6/29/2012	1:53:13 PM	PH3 MFC set to  0.000000
6/29/2012	1:53:13 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:53:13 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:53:13 PM	Tube furnace set to 0
6/29/2012	1:53:14 PM	Helium valve closed
6/29/2012	1:53:14 PM	BCl3 valve closed
6/29/2012	1:53:14 PM	PH3 valve closed
6/29/2012	1:53:14 PM	SiCl4 pre valve closed
6/29/2012	1:53:14 PM	SiCl4 post valve closed
6/29/2012	1:53:14 PM	Main Vac valve closed
6/29/2012	1:53:14 PM	Bypass valve closed
6/29/2012	1:53:14 PM	H2 valve opened
6/29/2012	1:53:14 PM	Bubbler valve opened
6/29/2012	1:53:14 PM	Helium MFC set to  0.000000
6/29/2012	1:53:14 PM	H2 MFC set to  500.000000
6/29/2012	1:53:14 PM	BCl3 MFC set to  0.000000
6/29/2012	1:53:14 PM	PH3 MFC set to  0.000000
6/29/2012	1:53:14 PM	SiCl4 MFC set to  0.000000
6/29/2012	1:53:14 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	1:53:14 PM	Tube furnace set to 950
6/29/2012	2:13:14 PM	Helium valve closed
6/29/2012	2:13:14 PM	PH3 valve closed
6/29/2012	2:13:14 PM	Main Vac valve closed
6/29/2012	2:13:14 PM	Bypass valve closed
6/29/2012	2:13:14 PM	H2 valve opened
6/29/2012	2:13:14 PM	BCl3 valve opened
6/29/2012	2:13:14 PM	SiCl4 pre valve opened
6/29/2012	2:13:14 PM	SiCl4 post valve opened
6/29/2012	2:13:14 PM	Bubbler valve opened
6/29/2012	2:13:14 PM	Helium MFC set to  0.000000
6/29/2012	2:13:14 PM	H2 MFC set to  500.000000
6/29/2012	2:13:14 PM	BCl3 MFC set to  1.000000
6/29/2012	2:13:14 PM	PH3 MFC set to  0.000000
6/29/2012	2:13:14 PM	SiCl4 MFC set to  25.000000
6/29/2012	2:13:14 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	2:13:14 PM	Tube furnace set to 950
6/29/2012	2:33:15 PM	Helium valve closed
6/29/2012	2:33:15 PM	BCl3 valve closed
6/29/2012	2:33:15 PM	PH3 valve closed
6/29/2012	2:33:15 PM	SiCl4 pre valve closed
6/29/2012	2:33:15 PM	SiCl4 post valve closed
6/29/2012	2:33:15 PM	Main Vac valve closed
6/29/2012	2:33:15 PM	Bypass valve closed
6/29/2012	2:33:15 PM	H2 valve opened
6/29/2012	2:33:15 PM	Bubbler valve opened
6/29/2012	2:33:15 PM	Helium MFC set to  0.000000
6/29/2012	2:33:15 PM	H2 MFC set to  500.000000
6/29/2012	2:33:15 PM	BCl3 MFC set to  0.000000
6/29/2012	2:33:15 PM	PH3 MFC set to  0.000000
6/29/2012	2:33:15 PM	SiCl4 MFC set to  0.000000
6/29/2012	2:33:15 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	2:33:15 PM	Tube furnace set to 750
6/29/2012	2:38:15 PM	H2 valve closed
6/29/2012	2:38:15 PM	BCl3 valve closed
6/29/2012	2:38:15 PM	PH3 valve closed
6/29/2012	2:38:15 PM	SiCl4 pre valve closed
6/29/2012	2:38:15 PM	SiCl4 post valve closed
6/29/2012	2:38:15 PM	Main Vac valve closed
6/29/2012	2:38:15 PM	Bypass valve closed
6/29/2012	2:38:15 PM	Helium valve opened
6/29/2012	2:38:15 PM	Bubbler valve opened
6/29/2012	2:38:15 PM	Helium MFC set to  500.000000
6/29/2012	2:38:15 PM	H2 MFC set to  0.000000
6/29/2012	2:38:15 PM	BCl3 MFC set to  0.000000
6/29/2012	2:38:15 PM	PH3 MFC set to  0.000000
6/29/2012	2:38:15 PM	SiCl4 MFC set to  0.000000
6/29/2012	2:38:15 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	2:38:15 PM	Tube furnace set to 0
6/29/2012	2:58:15 PM	Helium valve closed
6/29/2012	2:58:15 PM	H2 valve closed
6/29/2012	2:58:15 PM	BCl3 valve closed
6/29/2012	2:58:15 PM	PH3 valve closed
6/29/2012	2:58:15 PM	SiCl4 pre valve closed
6/29/2012	2:58:15 PM	SiCl4 post valve closed
6/29/2012	2:58:15 PM	Main Vac valve closed
6/29/2012	2:58:15 PM	Bypass valve closed
6/29/2012	2:58:15 PM	Bubbler valve closed
6/29/2012	2:58:15 PM	Helium MFC set to  0.000000
6/29/2012	2:58:15 PM	H2 MFC set to  0.000000
6/29/2012	2:58:15 PM	BCl3 MFC set to  0.000000
6/29/2012	2:58:15 PM	PH3 MFC set to  0.000000
6/29/2012	2:58:15 PM	SiCl4 MFC set to  0.000000
6/29/2012	2:58:15 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	2:58:15 PM	Tube furnace set to 0
6/29/2012	2:58:16 PM	Run finished at 2:58 PM
6/29/2012	3:03:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2012	3:03:51 PM	Recipe started at 3:03 PM
6/29/2012	3:03:51 PM	Helium valve closed
6/29/2012	3:03:51 PM	H2 valve closed
6/29/2012	3:03:51 PM	BCl3 valve closed
6/29/2012	3:03:51 PM	PH3 valve closed
6/29/2012	3:03:51 PM	SiCl4 pre valve closed
6/29/2012	3:03:51 PM	SiCl4 post valve closed
6/29/2012	3:03:51 PM	Main Vac valve closed
6/29/2012	3:03:51 PM	Bypass valve closed
6/29/2012	3:03:51 PM	Bubbler valve closed
6/29/2012	3:03:52 PM	Helium MFC set to  0.000000
6/29/2012	3:03:52 PM	H2 MFC set to  0.000000
6/29/2012	3:03:52 PM	BCl3 MFC set to  0.000000
6/29/2012	3:03:52 PM	PH3 MFC set to  0.000000
6/29/2012	3:03:52 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:03:52 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:03:52 PM	Tube furnace set to 0
6/29/2012	3:03:55 PM	H2 valve closed
6/29/2012	3:03:55 PM	BCl3 valve closed
6/29/2012	3:03:55 PM	PH3 valve closed
6/29/2012	3:03:55 PM	SiCl4 pre valve closed
6/29/2012	3:03:55 PM	SiCl4 post valve closed
6/29/2012	3:03:55 PM	Main Vac valve closed
6/29/2012	3:03:55 PM	Bypass valve closed
6/29/2012	3:03:55 PM	Bubbler valve closed
6/29/2012	3:03:55 PM	Helium valve opened
6/29/2012	3:03:55 PM	Helium MFC set to  500.000000
6/29/2012	3:03:55 PM	H2 MFC set to  0.000000
6/29/2012	3:03:55 PM	BCl3 MFC set to  0.000000
6/29/2012	3:03:55 PM	PH3 MFC set to  0.000000
6/29/2012	3:03:55 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:03:55 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:03:55 PM	Tube furnace set to 0
6/29/2012	3:03:57 PM	Helium valve closed
6/29/2012	3:03:57 PM	H2 valve closed
6/29/2012	3:03:57 PM	BCl3 valve closed
6/29/2012	3:03:57 PM	PH3 valve closed
6/29/2012	3:03:57 PM	SiCl4 pre valve closed
6/29/2012	3:03:57 PM	SiCl4 post valve closed
6/29/2012	3:03:57 PM	Main Vac valve closed
6/29/2012	3:03:57 PM	Bypass valve closed
6/29/2012	3:03:57 PM	Bubbler valve closed
6/29/2012	3:03:57 PM	Helium MFC set to  0.000000
6/29/2012	3:03:57 PM	H2 MFC set to  0.000000
6/29/2012	3:03:57 PM	BCl3 MFC set to  0.000000
6/29/2012	3:03:57 PM	PH3 MFC set to  0.000000
6/29/2012	3:03:57 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:03:57 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:03:57 PM	Tube furnace set to 0
6/29/2012	3:03:58 PM	Run finished at 3:03 PM
6/29/2012	3:03:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2012	3:09:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2012	3:09:09 PM	Recipe started at 3:09 PM
6/29/2012	3:09:09 PM	Helium valve closed
6/29/2012	3:09:09 PM	H2 valve closed
6/29/2012	3:09:09 PM	BCl3 valve closed
6/29/2012	3:09:09 PM	PH3 valve closed
6/29/2012	3:09:09 PM	SiCl4 pre valve closed
6/29/2012	3:09:09 PM	SiCl4 post valve closed
6/29/2012	3:09:09 PM	Main Vac valve closed
6/29/2012	3:09:09 PM	Bubbler valve closed
6/29/2012	3:09:09 PM	Bypass valve opened
6/29/2012	3:09:09 PM	Helium MFC set to  0.000000
6/29/2012	3:09:10 PM	H2 MFC set to  0.000000
6/29/2012	3:09:10 PM	BCl3 MFC set to  0.000000
6/29/2012	3:09:10 PM	PH3 MFC set to  0.000000
6/29/2012	3:09:10 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:09:10 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:09:10 PM	Tube furnace set to 0
6/29/2012	3:10:20 PM	Helium valve closed
6/29/2012	3:10:20 PM	H2 valve closed
6/29/2012	3:10:20 PM	BCl3 valve closed
6/29/2012	3:10:20 PM	PH3 valve closed
6/29/2012	3:10:20 PM	SiCl4 pre valve closed
6/29/2012	3:10:20 PM	SiCl4 post valve closed
6/29/2012	3:10:20 PM	Main Vac valve closed
6/29/2012	3:10:20 PM	Bubbler valve closed
6/29/2012	3:10:20 PM	Bypass valve opened
6/29/2012	3:10:20 PM	Helium MFC set to  0.000000
6/29/2012	3:10:20 PM	H2 MFC set to  0.000000
6/29/2012	3:10:20 PM	BCl3 MFC set to  0.000000
6/29/2012	3:10:20 PM	PH3 MFC set to  0.000000
6/29/2012	3:10:20 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:10:20 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:10:20 PM	Tube furnace set to 0
6/29/2012	3:10:32 PM	Helium valve closed
6/29/2012	3:10:32 PM	H2 valve closed
6/29/2012	3:10:32 PM	BCl3 valve closed
6/29/2012	3:10:32 PM	PH3 valve closed
6/29/2012	3:10:32 PM	SiCl4 pre valve closed
6/29/2012	3:10:32 PM	SiCl4 post valve closed
6/29/2012	3:10:32 PM	Bypass valve closed
6/29/2012	3:10:32 PM	Bubbler valve closed
6/29/2012	3:10:32 PM	Main Vac valve opened
6/29/2012	3:10:32 PM	Helium MFC set to  0.000000
6/29/2012	3:10:32 PM	H2 MFC set to  0.000000
6/29/2012	3:10:32 PM	BCl3 MFC set to  0.000000
6/29/2012	3:10:32 PM	PH3 MFC set to  0.000000
6/29/2012	3:10:32 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:10:32 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:10:33 PM	Tube furnace set to 0
6/29/2012	3:10:34 PM	Run finished at 3:10 PM
6/29/2012	3:10:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2012	3:34:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/29/2012	3:35:03 PM	Recipe started at 3:34 PM
6/29/2012	3:35:03 PM	Helium valve closed
6/29/2012	3:35:03 PM	H2 valve closed
6/29/2012	3:35:03 PM	BCl3 valve closed
6/29/2012	3:35:03 PM	PH3 valve closed
6/29/2012	3:35:03 PM	SiCl4 pre valve closed
6/29/2012	3:35:03 PM	SiCl4 post valve closed
6/29/2012	3:35:03 PM	Main Vac valve closed
6/29/2012	3:35:03 PM	Bubbler valve closed
6/29/2012	3:35:03 PM	Bypass valve opened
6/29/2012	3:35:03 PM	Helium MFC set to  0.000000
6/29/2012	3:35:03 PM	H2 MFC set to  0.000000
6/29/2012	3:35:03 PM	BCl3 MFC set to  0.000000
6/29/2012	3:35:03 PM	PH3 MFC set to  0.000000
6/29/2012	3:35:03 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:35:03 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:35:03 PM	Tube furnace set to 0
6/29/2012	3:35:03 PM	Helium valve closed
6/29/2012	3:35:03 PM	H2 valve closed
6/29/2012	3:35:03 PM	BCl3 valve closed
6/29/2012	3:35:03 PM	PH3 valve closed
6/29/2012	3:35:03 PM	SiCl4 pre valve closed
6/29/2012	3:35:03 PM	SiCl4 post valve closed
6/29/2012	3:35:03 PM	Main Vac valve closed
6/29/2012	3:35:03 PM	Bubbler valve closed
6/29/2012	3:35:03 PM	Bypass valve opened
6/29/2012	3:35:03 PM	Helium MFC set to  0.000000
6/29/2012	3:35:03 PM	H2 MFC set to  0.000000
6/29/2012	3:35:03 PM	BCl3 MFC set to  0.000000
6/29/2012	3:35:03 PM	PH3 MFC set to  0.000000
6/29/2012	3:35:03 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:35:03 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:35:04 PM	Tube furnace set to 0
6/29/2012	3:35:34 PM	Helium valve closed
6/29/2012	3:35:34 PM	H2 valve closed
6/29/2012	3:35:34 PM	BCl3 valve closed
6/29/2012	3:35:34 PM	PH3 valve closed
6/29/2012	3:35:34 PM	SiCl4 pre valve closed
6/29/2012	3:35:34 PM	SiCl4 post valve closed
6/29/2012	3:35:34 PM	Bypass valve closed
6/29/2012	3:35:34 PM	Bubbler valve closed
6/29/2012	3:35:34 PM	Main Vac valve opened
6/29/2012	3:35:34 PM	Helium MFC set to  0.000000
6/29/2012	3:35:34 PM	H2 MFC set to  0.000000
6/29/2012	3:35:34 PM	BCl3 MFC set to  0.000000
6/29/2012	3:35:34 PM	PH3 MFC set to  0.000000
6/29/2012	3:35:34 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:35:34 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:35:34 PM	Tube furnace set to 0
6/29/2012	3:36:04 PM	H2 valve closed
6/29/2012	3:36:04 PM	BCl3 valve closed
6/29/2012	3:36:04 PM	PH3 valve closed
6/29/2012	3:36:04 PM	SiCl4 pre valve closed
6/29/2012	3:36:04 PM	SiCl4 post valve closed
6/29/2012	3:36:04 PM	Bypass valve closed
6/29/2012	3:36:04 PM	Bubbler valve closed
6/29/2012	3:36:04 PM	Helium valve opened
6/29/2012	3:36:04 PM	Main Vac valve opened
6/29/2012	3:36:04 PM	Helium MFC set to  20.000000
6/29/2012	3:36:04 PM	H2 MFC set to  0.000000
6/29/2012	3:36:04 PM	BCl3 MFC set to  0.000000
6/29/2012	3:36:04 PM	PH3 MFC set to  0.000000
6/29/2012	3:36:04 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:36:04 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:36:04 PM	Tube furnace set to 0
6/29/2012	3:36:34 PM	Helium valve closed
6/29/2012	3:36:34 PM	H2 valve closed
6/29/2012	3:36:34 PM	BCl3 valve closed
6/29/2012	3:36:34 PM	PH3 valve closed
6/29/2012	3:36:34 PM	SiCl4 pre valve closed
6/29/2012	3:36:34 PM	SiCl4 post valve closed
6/29/2012	3:36:34 PM	Bypass valve closed
6/29/2012	3:36:34 PM	Bubbler valve closed
6/29/2012	3:36:34 PM	Main Vac valve opened
6/29/2012	3:36:34 PM	Helium MFC set to  0.000000
6/29/2012	3:36:34 PM	H2 MFC set to  0.000000
6/29/2012	3:36:34 PM	BCl3 MFC set to  0.000000
6/29/2012	3:36:34 PM	PH3 MFC set to  0.000000
6/29/2012	3:36:34 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:36:34 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:36:34 PM	Tube furnace set to 0
6/29/2012	3:37:04 PM	H2 valve closed
6/29/2012	3:37:04 PM	BCl3 valve closed
6/29/2012	3:37:04 PM	PH3 valve closed
6/29/2012	3:37:04 PM	SiCl4 pre valve closed
6/29/2012	3:37:04 PM	SiCl4 post valve closed
6/29/2012	3:37:04 PM	Bypass valve closed
6/29/2012	3:37:04 PM	Bubbler valve closed
6/29/2012	3:37:04 PM	Helium valve opened
6/29/2012	3:37:04 PM	Main Vac valve opened
6/29/2012	3:37:04 PM	Helium MFC set to  20.000000
6/29/2012	3:37:04 PM	H2 MFC set to  0.000000
6/29/2012	3:37:04 PM	BCl3 MFC set to  0.000000
6/29/2012	3:37:04 PM	PH3 MFC set to  0.000000
6/29/2012	3:37:04 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:37:04 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:37:05 PM	Tube furnace set to 0
6/29/2012	3:37:35 PM	Helium valve closed
6/29/2012	3:37:35 PM	H2 valve closed
6/29/2012	3:37:35 PM	BCl3 valve closed
6/29/2012	3:37:35 PM	PH3 valve closed
6/29/2012	3:37:35 PM	SiCl4 pre valve closed
6/29/2012	3:37:35 PM	SiCl4 post valve closed
6/29/2012	3:37:35 PM	Bypass valve closed
6/29/2012	3:37:35 PM	Bubbler valve closed
6/29/2012	3:37:35 PM	Main Vac valve opened
6/29/2012	3:37:35 PM	Helium MFC set to  0.000000
6/29/2012	3:37:35 PM	H2 MFC set to  0.000000
6/29/2012	3:37:35 PM	BCl3 MFC set to  0.000000
6/29/2012	3:37:35 PM	PH3 MFC set to  0.000000
6/29/2012	3:37:35 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:37:35 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:37:35 PM	Tube furnace set to 0
6/29/2012	3:38:05 PM	H2 valve closed
6/29/2012	3:38:05 PM	BCl3 valve closed
6/29/2012	3:38:05 PM	PH3 valve closed
6/29/2012	3:38:05 PM	SiCl4 pre valve closed
6/29/2012	3:38:05 PM	SiCl4 post valve closed
6/29/2012	3:38:05 PM	Bypass valve closed
6/29/2012	3:38:05 PM	Bubbler valve closed
6/29/2012	3:38:05 PM	Helium valve opened
6/29/2012	3:38:05 PM	Main Vac valve opened
6/29/2012	3:38:05 PM	Helium MFC set to  20.000000
6/29/2012	3:38:05 PM	H2 MFC set to  0.000000
6/29/2012	3:38:05 PM	BCl3 MFC set to  0.000000
6/29/2012	3:38:05 PM	PH3 MFC set to  0.000000
6/29/2012	3:38:05 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:38:05 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:38:05 PM	Tube furnace set to 0
6/29/2012	3:38:35 PM	Helium valve closed
6/29/2012	3:38:35 PM	H2 valve closed
6/29/2012	3:38:35 PM	BCl3 valve closed
6/29/2012	3:38:35 PM	PH3 valve closed
6/29/2012	3:38:35 PM	SiCl4 pre valve closed
6/29/2012	3:38:35 PM	SiCl4 post valve closed
6/29/2012	3:38:35 PM	Bypass valve closed
6/29/2012	3:38:35 PM	Bubbler valve closed
6/29/2012	3:38:35 PM	Main Vac valve opened
6/29/2012	3:38:35 PM	Helium MFC set to  0.000000
6/29/2012	3:38:35 PM	H2 MFC set to  0.000000
6/29/2012	3:38:35 PM	BCl3 MFC set to  0.000000
6/29/2012	3:38:35 PM	PH3 MFC set to  0.000000
6/29/2012	3:38:35 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:38:35 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:38:35 PM	Tube furnace set to 0
6/29/2012	3:39:05 PM	H2 valve closed
6/29/2012	3:39:05 PM	BCl3 valve closed
6/29/2012	3:39:05 PM	PH3 valve closed
6/29/2012	3:39:05 PM	SiCl4 pre valve closed
6/29/2012	3:39:05 PM	SiCl4 post valve closed
6/29/2012	3:39:05 PM	Bypass valve closed
6/29/2012	3:39:05 PM	Bubbler valve closed
6/29/2012	3:39:05 PM	Helium valve opened
6/29/2012	3:39:05 PM	Main Vac valve opened
6/29/2012	3:39:05 PM	Helium MFC set to  20.000000
6/29/2012	3:39:05 PM	H2 MFC set to  0.000000
6/29/2012	3:39:05 PM	BCl3 MFC set to  0.000000
6/29/2012	3:39:05 PM	PH3 MFC set to  0.000000
6/29/2012	3:39:05 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:39:05 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:39:06 PM	Tube furnace set to 0
6/29/2012	3:39:36 PM	Helium valve closed
6/29/2012	3:39:36 PM	H2 valve closed
6/29/2012	3:39:36 PM	BCl3 valve closed
6/29/2012	3:39:36 PM	PH3 valve closed
6/29/2012	3:39:36 PM	SiCl4 pre valve closed
6/29/2012	3:39:36 PM	SiCl4 post valve closed
6/29/2012	3:39:36 PM	Bypass valve closed
6/29/2012	3:39:36 PM	Bubbler valve closed
6/29/2012	3:39:36 PM	Main Vac valve opened
6/29/2012	3:39:36 PM	Helium MFC set to  0.000000
6/29/2012	3:39:36 PM	H2 MFC set to  0.000000
6/29/2012	3:39:36 PM	BCl3 MFC set to  0.000000
6/29/2012	3:39:36 PM	PH3 MFC set to  0.000000
6/29/2012	3:39:36 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:39:36 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:39:36 PM	Tube furnace set to 0
6/29/2012	3:40:06 PM	H2 valve closed
6/29/2012	3:40:06 PM	BCl3 valve closed
6/29/2012	3:40:06 PM	PH3 valve closed
6/29/2012	3:40:06 PM	SiCl4 pre valve closed
6/29/2012	3:40:06 PM	SiCl4 post valve closed
6/29/2012	3:40:06 PM	Bypass valve closed
6/29/2012	3:40:06 PM	Bubbler valve closed
6/29/2012	3:40:06 PM	Helium valve opened
6/29/2012	3:40:06 PM	Main Vac valve opened
6/29/2012	3:40:06 PM	Helium MFC set to  20.000000
6/29/2012	3:40:06 PM	H2 MFC set to  0.000000
6/29/2012	3:40:06 PM	BCl3 MFC set to  0.000000
6/29/2012	3:40:06 PM	PH3 MFC set to  0.000000
6/29/2012	3:40:06 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:40:06 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:40:06 PM	Tube furnace set to 0
6/29/2012	3:40:36 PM	Helium valve closed
6/29/2012	3:40:36 PM	H2 valve closed
6/29/2012	3:40:36 PM	BCl3 valve closed
6/29/2012	3:40:36 PM	PH3 valve closed
6/29/2012	3:40:36 PM	SiCl4 pre valve closed
6/29/2012	3:40:36 PM	SiCl4 post valve closed
6/29/2012	3:40:36 PM	Bypass valve closed
6/29/2012	3:40:36 PM	Bubbler valve closed
6/29/2012	3:40:36 PM	Main Vac valve opened
6/29/2012	3:40:36 PM	Helium MFC set to  0.000000
6/29/2012	3:40:36 PM	H2 MFC set to  0.000000
6/29/2012	3:40:36 PM	BCl3 MFC set to  0.000000
6/29/2012	3:40:36 PM	PH3 MFC set to  0.000000
6/29/2012	3:40:36 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:40:36 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:40:36 PM	Tube furnace set to 0
6/29/2012	3:41:06 PM	H2 valve closed
6/29/2012	3:41:06 PM	BCl3 valve closed
6/29/2012	3:41:06 PM	PH3 valve closed
6/29/2012	3:41:06 PM	SiCl4 pre valve closed
6/29/2012	3:41:06 PM	SiCl4 post valve closed
6/29/2012	3:41:06 PM	Bypass valve closed
6/29/2012	3:41:06 PM	Bubbler valve closed
6/29/2012	3:41:06 PM	Helium valve opened
6/29/2012	3:41:06 PM	Main Vac valve opened
6/29/2012	3:41:06 PM	Helium MFC set to  20.000000
6/29/2012	3:41:06 PM	H2 MFC set to  0.000000
6/29/2012	3:41:06 PM	BCl3 MFC set to  0.000000
6/29/2012	3:41:06 PM	PH3 MFC set to  0.000000
6/29/2012	3:41:06 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:41:06 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:41:06 PM	Tube furnace set to 0
6/29/2012	3:41:36 PM	Helium valve closed
6/29/2012	3:41:36 PM	H2 valve closed
6/29/2012	3:41:36 PM	BCl3 valve closed
6/29/2012	3:41:37 PM	PH3 valve closed
6/29/2012	3:41:37 PM	SiCl4 pre valve closed
6/29/2012	3:41:37 PM	SiCl4 post valve closed
6/29/2012	3:41:37 PM	Bypass valve closed
6/29/2012	3:41:37 PM	Bubbler valve closed
6/29/2012	3:41:37 PM	Main Vac valve opened
6/29/2012	3:41:37 PM	Helium MFC set to  0.000000
6/29/2012	3:41:37 PM	H2 MFC set to  0.000000
6/29/2012	3:41:37 PM	BCl3 MFC set to  0.000000
6/29/2012	3:41:37 PM	PH3 MFC set to  0.000000
6/29/2012	3:41:37 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:41:37 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:41:37 PM	Tube furnace set to 0
6/29/2012	3:42:07 PM	H2 valve closed
6/29/2012	3:42:07 PM	BCl3 valve closed
6/29/2012	3:42:07 PM	PH3 valve closed
6/29/2012	3:42:07 PM	SiCl4 pre valve closed
6/29/2012	3:42:07 PM	SiCl4 post valve closed
6/29/2012	3:42:07 PM	Bypass valve closed
6/29/2012	3:42:07 PM	Bubbler valve closed
6/29/2012	3:42:07 PM	Helium valve opened
6/29/2012	3:42:07 PM	Main Vac valve opened
6/29/2012	3:42:07 PM	Helium MFC set to  20.000000
6/29/2012	3:42:07 PM	H2 MFC set to  0.000000
6/29/2012	3:42:07 PM	BCl3 MFC set to  0.000000
6/29/2012	3:42:07 PM	PH3 MFC set to  0.000000
6/29/2012	3:42:07 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:42:07 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:42:07 PM	Tube furnace set to 0
6/29/2012	3:42:37 PM	Helium valve closed
6/29/2012	3:42:37 PM	H2 valve closed
6/29/2012	3:42:37 PM	BCl3 valve closed
6/29/2012	3:42:37 PM	PH3 valve closed
6/29/2012	3:42:37 PM	SiCl4 pre valve closed
6/29/2012	3:42:37 PM	SiCl4 post valve closed
6/29/2012	3:42:37 PM	Bypass valve closed
6/29/2012	3:42:37 PM	Bubbler valve closed
6/29/2012	3:42:37 PM	Main Vac valve opened
6/29/2012	3:42:37 PM	Helium MFC set to  0.000000
6/29/2012	3:42:37 PM	H2 MFC set to  0.000000
6/29/2012	3:42:37 PM	BCl3 MFC set to  0.000000
6/29/2012	3:42:37 PM	PH3 MFC set to  0.000000
6/29/2012	3:42:37 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:42:37 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:42:37 PM	Tube furnace set to 0
6/29/2012	3:43:07 PM	H2 valve closed
6/29/2012	3:43:07 PM	BCl3 valve closed
6/29/2012	3:43:07 PM	PH3 valve closed
6/29/2012	3:43:07 PM	SiCl4 pre valve closed
6/29/2012	3:43:07 PM	SiCl4 post valve closed
6/29/2012	3:43:07 PM	Bypass valve closed
6/29/2012	3:43:07 PM	Bubbler valve closed
6/29/2012	3:43:07 PM	Helium valve opened
6/29/2012	3:43:07 PM	Main Vac valve opened
6/29/2012	3:43:07 PM	Helium MFC set to  20.000000
6/29/2012	3:43:07 PM	H2 MFC set to  0.000000
6/29/2012	3:43:07 PM	BCl3 MFC set to  0.000000
6/29/2012	3:43:07 PM	PH3 MFC set to  0.000000
6/29/2012	3:43:07 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:43:07 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:43:07 PM	Tube furnace set to 0
6/29/2012	3:43:37 PM	Helium valve closed
6/29/2012	3:43:37 PM	H2 valve closed
6/29/2012	3:43:37 PM	BCl3 valve closed
6/29/2012	3:43:37 PM	PH3 valve closed
6/29/2012	3:43:37 PM	SiCl4 pre valve closed
6/29/2012	3:43:37 PM	SiCl4 post valve closed
6/29/2012	3:43:37 PM	Bypass valve closed
6/29/2012	3:43:37 PM	Bubbler valve closed
6/29/2012	3:43:37 PM	Main Vac valve opened
6/29/2012	3:43:37 PM	Helium MFC set to  0.000000
6/29/2012	3:43:37 PM	H2 MFC set to  0.000000
6/29/2012	3:43:37 PM	BCl3 MFC set to  0.000000
6/29/2012	3:43:37 PM	PH3 MFC set to  0.000000
6/29/2012	3:43:37 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:43:37 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:43:38 PM	Tube furnace set to 0
6/29/2012	3:44:08 PM	H2 valve closed
6/29/2012	3:44:08 PM	BCl3 valve closed
6/29/2012	3:44:08 PM	PH3 valve closed
6/29/2012	3:44:08 PM	SiCl4 pre valve closed
6/29/2012	3:44:08 PM	SiCl4 post valve closed
6/29/2012	3:44:08 PM	Bypass valve closed
6/29/2012	3:44:08 PM	Bubbler valve closed
6/29/2012	3:44:08 PM	Helium valve opened
6/29/2012	3:44:08 PM	Main Vac valve opened
6/29/2012	3:44:08 PM	Helium MFC set to  20.000000
6/29/2012	3:44:08 PM	H2 MFC set to  0.000000
6/29/2012	3:44:08 PM	BCl3 MFC set to  0.000000
6/29/2012	3:44:08 PM	PH3 MFC set to  0.000000
6/29/2012	3:44:08 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:44:08 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:44:08 PM	Tube furnace set to 0
6/29/2012	3:44:38 PM	Helium valve closed
6/29/2012	3:44:38 PM	H2 valve closed
6/29/2012	3:44:38 PM	BCl3 valve closed
6/29/2012	3:44:38 PM	PH3 valve closed
6/29/2012	3:44:38 PM	SiCl4 pre valve closed
6/29/2012	3:44:38 PM	SiCl4 post valve closed
6/29/2012	3:44:38 PM	Bypass valve closed
6/29/2012	3:44:38 PM	Bubbler valve closed
6/29/2012	3:44:38 PM	Main Vac valve opened
6/29/2012	3:44:38 PM	Helium MFC set to  0.000000
6/29/2012	3:44:38 PM	H2 MFC set to  0.000000
6/29/2012	3:44:38 PM	BCl3 MFC set to  0.000000
6/29/2012	3:44:38 PM	PH3 MFC set to  0.000000
6/29/2012	3:44:38 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:44:38 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:44:38 PM	Tube furnace set to 0
6/29/2012	3:45:08 PM	H2 valve closed
6/29/2012	3:45:08 PM	BCl3 valve closed
6/29/2012	3:45:08 PM	PH3 valve closed
6/29/2012	3:45:08 PM	SiCl4 pre valve closed
6/29/2012	3:45:08 PM	SiCl4 post valve closed
6/29/2012	3:45:08 PM	Bypass valve closed
6/29/2012	3:45:08 PM	Bubbler valve closed
6/29/2012	3:45:08 PM	Helium valve opened
6/29/2012	3:45:08 PM	Main Vac valve opened
6/29/2012	3:45:08 PM	Helium MFC set to  20.000000
6/29/2012	3:45:08 PM	H2 MFC set to  0.000000
6/29/2012	3:45:08 PM	BCl3 MFC set to  0.000000
6/29/2012	3:45:08 PM	PH3 MFC set to  0.000000
6/29/2012	3:45:08 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:45:08 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:45:08 PM	Tube furnace set to 0
6/29/2012	3:45:38 PM	Helium valve closed
6/29/2012	3:45:38 PM	H2 valve closed
6/29/2012	3:45:38 PM	BCl3 valve closed
6/29/2012	3:45:38 PM	PH3 valve closed
6/29/2012	3:45:38 PM	SiCl4 pre valve closed
6/29/2012	3:45:38 PM	SiCl4 post valve closed
6/29/2012	3:45:38 PM	Bypass valve closed
6/29/2012	3:45:38 PM	Bubbler valve closed
6/29/2012	3:45:38 PM	Main Vac valve opened
6/29/2012	3:45:38 PM	Helium MFC set to  0.000000
6/29/2012	3:45:38 PM	H2 MFC set to  0.000000
6/29/2012	3:45:38 PM	BCl3 MFC set to  0.000000
6/29/2012	3:45:38 PM	PH3 MFC set to  0.000000
6/29/2012	3:45:38 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:45:38 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:45:39 PM	Tube furnace set to 0
6/29/2012	3:45:40 PM	Run finished at 3:45 PM
6/29/2012	3:45:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10xhepurge.xml
6/29/2012	3:47:26 PM	Recipe started at 3:47 PM
6/29/2012	3:47:26 PM	Helium valve closed
6/29/2012	3:47:26 PM	H2 valve closed
6/29/2012	3:47:26 PM	BCl3 valve closed
6/29/2012	3:47:26 PM	PH3 valve closed
6/29/2012	3:47:26 PM	SiCl4 pre valve closed
6/29/2012	3:47:26 PM	SiCl4 post valve closed
6/29/2012	3:47:26 PM	Main Vac valve closed
6/29/2012	3:47:26 PM	Bypass valve closed
6/29/2012	3:47:26 PM	Bubbler valve closed
6/29/2012	3:47:26 PM	Helium MFC set to  0.000000
6/29/2012	3:47:26 PM	H2 MFC set to  0.000000
6/29/2012	3:47:26 PM	BCl3 MFC set to  0.000000
6/29/2012	3:47:26 PM	PH3 MFC set to  0.000000
6/29/2012	3:47:26 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:47:26 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:47:26 PM	Tube furnace set to 0
6/29/2012	3:47:29 PM	Helium valve closed
6/29/2012	3:47:29 PM	BCl3 valve closed
6/29/2012	3:47:29 PM	PH3 valve closed
6/29/2012	3:47:29 PM	SiCl4 pre valve closed
6/29/2012	3:47:29 PM	SiCl4 post valve closed
6/29/2012	3:47:29 PM	Main Vac valve closed
6/29/2012	3:47:29 PM	Bypass valve closed
6/29/2012	3:47:29 PM	Bubbler valve closed
6/29/2012	3:47:29 PM	H2 valve opened
6/29/2012	3:47:29 PM	Helium MFC set to  0.000000
6/29/2012	3:47:29 PM	H2 MFC set to  500.000000
6/29/2012	3:47:29 PM	BCl3 MFC set to  0.000000
6/29/2012	3:47:29 PM	PH3 MFC set to  0.000000
6/29/2012	3:47:29 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:47:29 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:47:29 PM	Tube furnace set to 0
6/29/2012	3:48:45 PM	Helium valve closed
6/29/2012	3:48:45 PM	BCl3 valve closed
6/29/2012	3:48:46 PM	PH3 valve closed
6/29/2012	3:48:46 PM	SiCl4 pre valve closed
6/29/2012	3:48:46 PM	SiCl4 post valve closed
6/29/2012	3:48:46 PM	Main Vac valve closed
6/29/2012	3:48:46 PM	Bypass valve closed
6/29/2012	3:48:46 PM	H2 valve opened
6/29/2012	3:48:46 PM	Bubbler valve opened
6/29/2012	3:48:46 PM	Helium MFC set to  0.000000
6/29/2012	3:48:46 PM	H2 MFC set to  500.000000
6/29/2012	3:48:46 PM	BCl3 MFC set to  0.000000
6/29/2012	3:48:46 PM	PH3 MFC set to  0.000000
6/29/2012	3:48:46 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:48:46 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:48:46 PM	Tube furnace set to 0
6/29/2012	3:48:47 PM	Helium valve closed
6/29/2012	3:48:47 PM	BCl3 valve closed
6/29/2012	3:48:47 PM	PH3 valve closed
6/29/2012	3:48:47 PM	SiCl4 pre valve closed
6/29/2012	3:48:47 PM	SiCl4 post valve closed
6/29/2012	3:48:47 PM	Main Vac valve closed
6/29/2012	3:48:47 PM	Bypass valve closed
6/29/2012	3:48:47 PM	H2 valve opened
6/29/2012	3:48:47 PM	Bubbler valve opened
6/29/2012	3:48:47 PM	Helium MFC set to  0.000000
6/29/2012	3:48:47 PM	H2 MFC set to  500.000000
6/29/2012	3:48:47 PM	BCl3 MFC set to  0.000000
6/29/2012	3:48:47 PM	PH3 MFC set to  0.000000
6/29/2012	3:48:47 PM	SiCl4 MFC set to  0.000000
6/29/2012	3:48:47 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	3:48:47 PM	Tube furnace set to 950
6/29/2012	4:08:47 PM	Helium valve closed
6/29/2012	4:08:47 PM	PH3 valve closed
6/29/2012	4:08:47 PM	Main Vac valve closed
6/29/2012	4:08:47 PM	Bypass valve closed
6/29/2012	4:08:47 PM	H2 valve opened
6/29/2012	4:08:47 PM	BCl3 valve opened
6/29/2012	4:08:47 PM	SiCl4 pre valve opened
6/29/2012	4:08:47 PM	SiCl4 post valve opened
6/29/2012	4:08:47 PM	Bubbler valve opened
6/29/2012	4:08:47 PM	Helium MFC set to  0.000000
6/29/2012	4:08:47 PM	H2 MFC set to  500.000000
6/29/2012	4:08:47 PM	BCl3 MFC set to  1.000000
6/29/2012	4:08:47 PM	PH3 MFC set to  0.000000
6/29/2012	4:08:47 PM	SiCl4 MFC set to  50.000000
6/29/2012	4:08:47 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	4:08:47 PM	Tube furnace set to 950
6/29/2012	4:28:47 PM	Helium valve closed
6/29/2012	4:28:47 PM	BCl3 valve closed
6/29/2012	4:28:47 PM	PH3 valve closed
6/29/2012	4:28:47 PM	SiCl4 pre valve closed
6/29/2012	4:28:47 PM	SiCl4 post valve closed
6/29/2012	4:28:47 PM	Main Vac valve closed
6/29/2012	4:28:47 PM	Bypass valve closed
6/29/2012	4:28:47 PM	H2 valve opened
6/29/2012	4:28:47 PM	Bubbler valve opened
6/29/2012	4:28:47 PM	Helium MFC set to  0.000000
6/29/2012	4:28:47 PM	H2 MFC set to  500.000000
6/29/2012	4:28:47 PM	BCl3 MFC set to  0.000000
6/29/2012	4:28:47 PM	PH3 MFC set to  0.000000
6/29/2012	4:28:47 PM	SiCl4 MFC set to  0.000000
6/29/2012	4:28:47 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	4:28:47 PM	Tube furnace set to 750
6/29/2012	4:33:47 PM	H2 valve closed
6/29/2012	4:33:47 PM	BCl3 valve closed
6/29/2012	4:33:47 PM	PH3 valve closed
6/29/2012	4:33:47 PM	SiCl4 pre valve closed
6/29/2012	4:33:47 PM	SiCl4 post valve closed
6/29/2012	4:33:47 PM	Main Vac valve closed
6/29/2012	4:33:47 PM	Bypass valve closed
6/29/2012	4:33:47 PM	Helium valve opened
6/29/2012	4:33:47 PM	Bubbler valve opened
6/29/2012	4:33:47 PM	Helium MFC set to  500.000000
6/29/2012	4:33:47 PM	H2 MFC set to  0.000000
6/29/2012	4:33:47 PM	BCl3 MFC set to  0.000000
6/29/2012	4:33:47 PM	PH3 MFC set to  0.000000
6/29/2012	4:33:47 PM	SiCl4 MFC set to  0.000000
6/29/2012	4:33:47 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	4:33:48 PM	Tube furnace set to 0
6/29/2012	4:50:00 PM	Run aborted at 4:50 PM
6/29/2012	4:50:00 PM	Helium valve closed
6/29/2012	4:50:00 PM	H2 valve closed
6/29/2012	4:50:00 PM	BCl3 valve closed
6/29/2012	4:50:00 PM	PH3 valve closed
6/29/2012	4:50:00 PM	SiCl4 pre valve closed
6/29/2012	4:50:00 PM	SiCl4 post valve closed
6/29/2012	4:50:00 PM	Bypass valve closed
6/29/2012	4:50:00 PM	Main Vac valve closed
6/29/2012	4:50:00 PM	Bubbler valve closed
6/29/2012	4:50:00 PM	Helium MFC set to  0.000000
6/29/2012	4:50:00 PM	H2 MFC set to  0.000000
6/29/2012	4:50:00 PM	BCl3 MFC set to  0.000000
6/29/2012	4:50:00 PM	PH3 MFC set to  0.000000
6/29/2012	4:50:00 PM	SiCl4 MFC set to  0.000000
6/29/2012	4:50:00 PM	Tube furnace set to 0
6/29/2012	4:50:21 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2012	4:50:22 PM	Recipe started at 4:50 PM
6/29/2012	4:50:22 PM	Helium valve closed
6/29/2012	4:50:22 PM	H2 valve closed
6/29/2012	4:50:22 PM	BCl3 valve closed
6/29/2012	4:50:22 PM	PH3 valve closed
6/29/2012	4:50:22 PM	SiCl4 pre valve closed
6/29/2012	4:50:22 PM	SiCl4 post valve closed
6/29/2012	4:50:22 PM	Main Vac valve closed
6/29/2012	4:50:22 PM	Bypass valve closed
6/29/2012	4:50:22 PM	Bubbler valve closed
6/29/2012	4:50:22 PM	Helium MFC set to  0.000000
6/29/2012	4:50:22 PM	H2 MFC set to  0.000000
6/29/2012	4:50:22 PM	BCl3 MFC set to  0.000000
6/29/2012	4:50:22 PM	PH3 MFC set to  0.000000
6/29/2012	4:50:22 PM	SiCl4 MFC set to  0.000000
6/29/2012	4:50:22 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	4:50:22 PM	Tube furnace set to 0
6/29/2012	4:50:25 PM	H2 valve closed
6/29/2012	4:50:25 PM	BCl3 valve closed
6/29/2012	4:50:25 PM	PH3 valve closed
6/29/2012	4:50:25 PM	SiCl4 pre valve closed
6/29/2012	4:50:25 PM	SiCl4 post valve closed
6/29/2012	4:50:25 PM	Main Vac valve closed
6/29/2012	4:50:25 PM	Bypass valve closed
6/29/2012	4:50:25 PM	Bubbler valve closed
6/29/2012	4:50:25 PM	Helium valve opened
6/29/2012	4:50:25 PM	Helium MFC set to  500.000000
6/29/2012	4:50:25 PM	H2 MFC set to  0.000000
6/29/2012	4:50:25 PM	BCl3 MFC set to  0.000000
6/29/2012	4:50:25 PM	PH3 MFC set to  0.000000
6/29/2012	4:50:25 PM	SiCl4 MFC set to  0.000000
6/29/2012	4:50:25 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	4:50:26 PM	Tube furnace set to 0
6/29/2012	4:50:26 PM	Helium valve closed
6/29/2012	4:50:26 PM	H2 valve closed
6/29/2012	4:50:26 PM	BCl3 valve closed
6/29/2012	4:50:26 PM	PH3 valve closed
6/29/2012	4:50:26 PM	SiCl4 pre valve closed
6/29/2012	4:50:26 PM	SiCl4 post valve closed
6/29/2012	4:50:26 PM	Main Vac valve closed
6/29/2012	4:50:26 PM	Bypass valve closed
6/29/2012	4:50:26 PM	Bubbler valve closed
6/29/2012	4:50:26 PM	Helium MFC set to  0.000000
6/29/2012	4:50:26 PM	H2 MFC set to  0.000000
6/29/2012	4:50:26 PM	BCl3 MFC set to  0.000000
6/29/2012	4:50:26 PM	PH3 MFC set to  0.000000
6/29/2012	4:50:26 PM	SiCl4 MFC set to  0.000000
6/29/2012	4:50:26 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	4:50:26 PM	Tube furnace set to 0
6/29/2012	4:50:27 PM	Run finished at 4:50 PM
6/29/2012	4:50:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
6/29/2012	4:55:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
6/29/2012	4:55:24 PM	Recipe started at 4:55 PM
6/29/2012	4:55:24 PM	Helium valve closed
6/29/2012	4:55:24 PM	H2 valve closed
6/29/2012	4:55:24 PM	BCl3 valve closed
6/29/2012	4:55:24 PM	PH3 valve closed
6/29/2012	4:55:24 PM	SiCl4 pre valve closed
6/29/2012	4:55:24 PM	SiCl4 post valve closed
6/29/2012	4:55:24 PM	Main Vac valve closed
6/29/2012	4:55:24 PM	Bubbler valve closed
6/29/2012	4:55:24 PM	Bypass valve opened
6/29/2012	4:55:24 PM	Helium MFC set to  0.000000
6/29/2012	4:55:24 PM	H2 MFC set to  0.000000
6/29/2012	4:55:24 PM	BCl3 MFC set to  0.000000
6/29/2012	4:55:24 PM	PH3 MFC set to  0.000000
6/29/2012	4:55:24 PM	SiCl4 MFC set to  0.000000
6/29/2012	4:55:24 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	4:55:24 PM	Tube furnace set to 0
6/29/2012	4:56:35 PM	Helium valve closed
6/29/2012	4:56:35 PM	H2 valve closed
6/29/2012	4:56:35 PM	BCl3 valve closed
6/29/2012	4:56:35 PM	PH3 valve closed
6/29/2012	4:56:35 PM	SiCl4 pre valve closed
6/29/2012	4:56:35 PM	SiCl4 post valve closed
6/29/2012	4:56:35 PM	Main Vac valve closed
6/29/2012	4:56:35 PM	Bubbler valve closed
6/29/2012	4:56:35 PM	Bypass valve opened
6/29/2012	4:56:35 PM	Helium MFC set to  0.000000
6/29/2012	4:56:35 PM	H2 MFC set to  0.000000
6/29/2012	4:56:35 PM	BCl3 MFC set to  0.000000
6/29/2012	4:56:35 PM	PH3 MFC set to  0.000000
6/29/2012	4:56:35 PM	SiCl4 MFC set to  0.000000
6/29/2012	4:56:35 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	4:56:35 PM	Tube furnace set to 0
6/29/2012	4:57:35 PM	Helium valve closed
6/29/2012	4:57:35 PM	H2 valve closed
6/29/2012	4:57:35 PM	BCl3 valve closed
6/29/2012	4:57:35 PM	PH3 valve closed
6/29/2012	4:57:35 PM	SiCl4 pre valve closed
6/29/2012	4:57:35 PM	SiCl4 post valve closed
6/29/2012	4:57:35 PM	Bypass valve closed
6/29/2012	4:57:35 PM	Bubbler valve closed
6/29/2012	4:57:36 PM	Main Vac valve opened
6/29/2012	4:57:36 PM	Helium MFC set to  0.000000
6/29/2012	4:57:36 PM	H2 MFC set to  0.000000
6/29/2012	4:57:36 PM	BCl3 MFC set to  0.000000
6/29/2012	4:57:36 PM	PH3 MFC set to  0.000000
6/29/2012	4:57:36 PM	SiCl4 MFC set to  0.000000
6/29/2012	4:57:36 PM	Bypass solenoid MFC set to  0.000000
6/29/2012	4:57:36 PM	Tube furnace set to 0
6/29/2012	4:57:37 PM	Run finished at 4:57 PM
6/29/2012	4:57:37 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
